Status and countermeasure of MEMS sensors standardization

CHEN Qin1; FAN Shu-xin2; ZHANG Wei-bo2

doi:10.13873/j.1000-97872007.08.007

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Status and countermeasure of MEMS sensors standardization

更新时间：2025-09-11

- Status and countermeasure of MEMS sensors standardization
- Issue 8, Pages: 6-8(2007)
- 作者机构：
  
  1. 信息产业部标准化研究所
  2. 中国电子科技集团公司第四十九研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.08.007
  CLC： TP212.1
- Published：2007
- 稿件说明：
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[1]陈勤,范树新,张维波.MEMS传感器的标准化现状与发展对策[J].传感器与微系统,2007(08):6-8.

CHEN Qin1, FAN Shu-xin2, ZHANG Wei-bo2. Status and countermeasure of MEMS sensors standardization[J]. 2007, (8): 6-8.
[1]陈勤,范树新,张维波.MEMS传感器的标准化现状与发展对策[J].传感器与微系统,2007(08):6-8. DOI： 10.13873/j.1000-97872007.08.007.

CHEN Qin1, FAN Shu-xin2, ZHANG Wei-bo2. Status and countermeasure of MEMS sensors standardization[J]. 2007, (8): 6-8. DOI： 10.13873/j.1000-97872007.08.007.

摘要

随着MEMS传感器在各个领域的广泛应用

传感器领域的标准化工作思路和技术路线发生了变化。论述了目前国内外MEMS传感器标准的现状

并就国内外MEMS传感器标准体系的发展过程、特点、标准体系存在的问题、与现有半导体标准的关系进行了分析探讨

同时

对我国MEMS传感器标准的发展对策提出了建议。

Abstract

With the application of MEMS sensor in a lot of fields

working theories and technique ways of standardization in sensor fields are changed.The current status of MEMS sensor standardization at home and abraod is discussed

and the development process

characteristics and existing problems of MEMS sensor system in connection with current semicondition standardization are analyzed.The proposal of MEMS sensor development is provided.

关键词

Keywords

references

微传感器与微执行器全书[M]. 科学出版社 , (美)格雷戈里T.A.科瓦奇（GregoryT.A.Kovacs）著, 2003

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