Study of off-chip tensile test experimental facility for micro-component mechanical property

SHEN Hong-yuan; CHU Jin-kui; ZHANG Duan-qin; LUO Ru-lin

doi:10.13873/j.1000-97872007.07.038

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Study of off-chip tensile test experimental facility for micro-component mechanical property

更新时间：2025-09-11

- Study of off-chip tensile test experimental facility for micro-component mechanical property
- Issue 7, Pages: 99-101+110(2007)
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点试验室辽宁省微纳米技术及系统重点试验室
  2. 大连理工大学精密与特种加工教育部重点试验室辽宁省微纳米技术及系统重点试验室,辽宁,大连,116023
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.07.038
  CLC： TH87
- Published：2007
- 稿件说明：
移动端阅览
[1]沈洪源,褚金奎,张段芹,罗汝林.微构件力学性能片外拉伸测试装置[J].传感器与微系统,2007(07):99-101+110.

SHEN Hong-yuan, CHU Jin-kui, ZHANG Duan-qin, et al. Study of off-chip tensile test experimental facility for micro-component mechanical property[J]. 2007, (7): 99-101+110.
[1]沈洪源,褚金奎,张段芹,罗汝林.微构件力学性能片外拉伸测试装置[J].传感器与微系统,2007(07):99-101+110. DOI： 10.13873/j.1000-97872007.07.038.

SHEN Hong-yuan, CHU Jin-kui, ZHANG Duan-qin, et al. Study of off-chip tensile test experimental facility for micro-component mechanical property[J]. 2007, (7): 99-101+110. DOI： 10.13873/j.1000-97872007.07.038.

摘要

微构件材料力学性能测试中

拉伸测试主要解决材料弹性模量、泊松比、屈服强度和断裂强度的测量问题。介绍了一种片外拉伸测试试验装置的设计过程及工作原理

试样放在动/静载物台上

压电陶瓷制动器驱动动载物台

从而拉动试样

直到试样被拉断。施加在试样上的力和试样被拉伸后的伸长量分别由微力检测传感器和位移检测传感器测出。分别介绍了每个部件的功能

给出了误差分析。结果表明:此装置设计合理

达到预期目标。

Abstract

The main function of tensile test in mechanical property testing of micro-sized structure is measurement question of elastic ratio

Poisson’s ratio

yield strength anad fracture strength.A design procedure and principle of a off-chip tensile test experimental facility are presented.The specimen is placed on the dynamic and static platform

piezoelectric actuator drives dynamic platform to pull specimen till specimen is snapped.The force loaded on the specimen and the elongation of it are measured by the displacement sensor and the force sensor respectively.Every part of the facility separately is presented

the analysis of error is given.The result shows the design of the facility is logical

achieves prospective aim.

关键词

Keywords

references

Mechanical behavior of a μ m-sized single crystal silicon structure with sharp notches [J] . E. Mazza,J. Dual. Journal of the Mechanics and Physics of Solids . 1999 (8)

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Related Institution

School of Mechanical Engineering,Tongji University

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