Structure optimization of corrugated diaphragm in pressure sensor packaging

FU Xing-ming1; TAN Liu-xi1; YAO Yuan3; LIU Sheng1

doi:10.13873/j.1000-97872007.07.020

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Structure optimization of corrugated diaphragm in pressure sensor packaging

更新时间：2025-09-11

- Structure optimization of corrugated diaphragm in pressure sensor packaging
- Issue 7, Pages: 80-81+84(2007)
- 作者机构：
  
  1. 武汉光电国家实验室
  2. 上海飞恩微电子有限公司
  3. 武汉光电国家实验室,湖北,武汉,430074
  4. 华中科技大学微系统研究中心
  5. ,上海,201203
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.07.020
  CLC： TP212.1
- Published：2007
- 稿件说明：
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[1]付兴铭,谭六喜,姚媛,刘胜.压力传感器封装中波纹膜片的结构优化[J].传感器与微系统,2007(07):80-81+84.

FU Xing-ming1, TAN Liu-xi1, YAO Yuan3, et al. Structure optimization of corrugated diaphragm in pressure sensor packaging[J]. 2007, (7): 80-81+84.
[1]付兴铭,谭六喜,姚媛,刘胜.压力传感器封装中波纹膜片的结构优化[J].传感器与微系统,2007(07):80-81+84. DOI： 10.13873/j.1000-97872007.07.020.

FU Xing-ming1, TAN Liu-xi1, YAO Yuan3, et al. Structure optimization of corrugated diaphragm in pressure sensor packaging[J]. 2007, (7): 80-81+84. DOI： 10.13873/j.1000-97872007.07.020.

摘要

对压力传感器隔离封装中的关键部件——波纹膜片

采用有限元分析的方法

分别得到了2

6个波纹的膜片的弹性特性

并根据封装要求选择了6波纹的膜片。通过比较不同波数的膜片对压力传感器输出信号的影响

验证了膜片结构优化的正确性。最后

使用6波纹的膜片进行封装

得到了性能稳定的压力传感器

并测试得到了其主要的静态参数。

Abstract

The corrugated diaphragm

one of the most important isolation packaging parts

is optimized in structure.Pressure-displacement curves of corrugated diaphragms with 2

6 pitches are obtained by finite elements analysis（FEA）and the 6 pitch one is selected based on the packaging requirements.The optimization of corrugated diaphragm is testified by comparing the effects of diaphragms on the output of pressure sensors.At last

the 6 pitches diaphragm is conducted into packaging

and high stability pressure sensor is obtained.

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Keywords

references

高温压力传感器固态隔离封装技术的研究 [J]. 张生才,姚素英,刘艳艳,赵毅强,张为. 电子科技大学学报 . 2002(02)

扩散硅压力传感器结构设计及封装工艺研究 [J]. 刘沁,吕忠钢,陈艳文. 仪表技术与传感器 . 1996(10)

压力传感器的设计制造与应用[M]. 冶金工业出版社 , 孙以材等编著, 2000

机器及仪表弹性元件的计算[M]. 化学工业出版社 , [苏]波诺马廖夫（Пономарёв,С·Д·）,[苏]安德烈耶娃（Андреева,Л·Е·）著, 1987

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