Research on micro capacitive wireless accelerometer based on MEMS

WANG Shao-hua1; LI Hong-wei1; OU Jin-ping1

doi:10.13873/j.1000-97872007.06.021

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Research on micro capacitive wireless accelerometer based on MEMS

更新时间：2025-09-11

- Research on micro capacitive wireless accelerometer based on MEMS
- Issue 6, Pages: 94-96(2007)
- 作者机构：
  
  1. 哈尔滨工业大学
  2. 哈尔滨工业大学,黑龙江,哈尔滨,150090
  3. 大连理工大学
  4. ,辽宁,大连,116024
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.06.021
  CLC： TP212.1
- Published：2007
- 稿件说明：
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[1]王少华,李宏伟,欧进萍.基于MEMS的微电容式无线加速度传感器的研究[J].传感器与微系统,2007(06):94-96.

WANG Shao-hua1, LI Hong-wei1, OU Jin-ping1. Research on micro capacitive wireless accelerometer based on MEMS[J]. 2007, (6): 94-96.
[1]王少华,李宏伟,欧进萍.基于MEMS的微电容式无线加速度传感器的研究[J].传感器与微系统,2007(06):94-96. DOI： 10.13873/j.1000-97872007.06.021.

WANG Shao-hua1, LI Hong-wei1, OU Jin-ping1. Research on micro capacitive wireless accelerometer based on MEMS[J]. 2007, (6): 94-96. DOI： 10.13873/j.1000-97872007.06.021.

摘要

介绍了一种基于MEMS技术制作的微电容式无线加速度传感器的设计与实现。研究了无线加速度传感器的整体设计方案

给出了硬件电路设计和软件设计过程

并实现了原型产品的调试与制作。为验证原型产品的有效性

将其安装在实际桥梁上进行振动测试

给出了数据分析计算结果。

Abstract

The design and implementation of a micro capacitive wireless accelerometer based on MEMES is presented.The framework of the wireless accelerometer is studied

and the design of the hardware and software is described.A prototype of the proposed wireless accelerometer is set up and fabricated.To test the validity of the prototype product

it is installed on a cable-stayed bridge to measure the vibration of the bridge.The results of the analyzed data are then presented.

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