Modal analysis of MEMS gyroscope

WEI Dong; ZHANG Zhi-jie

doi:10.13873/j.1000-97872007.04.025

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Modal analysis of MEMS gyroscope

更新时间：2025-09-11

- Modal analysis of MEMS gyroscope
- Issue 4, Pages: 34-35+39(2007)
- 作者机构：
  
  1. 中北大学电子工程系仪器科学与动态测试教育部重点实验室
  2. 中北大学电子工程系仪器科学与动态测试教育部重点实验室,山西,太原,030051
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.04.025
  CLC： TP212
- Published：2007
- 稿件说明：
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[1]魏冬,张志杰.微机械陀螺仪模态分析[J].传感器与微系统,2007(04):34-35+39.

WEI Dong, ZHANG Zhi-jie. Modal analysis of MEMS gyroscope[J]. 2007, (4): 34-35+39.
[1]魏冬,张志杰.微机械陀螺仪模态分析[J].传感器与微系统,2007(04):34-35+39. DOI： 10.13873/j.1000-97872007.04.025.

WEI Dong, ZHANG Zhi-jie. Modal analysis of MEMS gyroscope[J]. 2007, (4): 34-35+39. DOI： 10.13873/j.1000-97872007.04.025.

摘要

利用计算机软件对有限元法构建的微机械陀螺仪模型进行分析可以掌握其各种参数。根据静电梳状驱动结构

设计符合性能指标的陀螺仪结构

并利用有限元分析法借助ANSYS软件对陀螺仪进行模态分析

从而得出陀螺仪的驱动模态和敏感模态

为已经设计的结构提供分析和修正的参考

从而提高微机械陀螺仪设计结构的品质因数。

Abstract

A series of parameter can be obtained though the modal analysis of MEMS gyroscope by the element finite methol.Based on electrostatic comb-like driver structure

the structure of MEMS gyroscope is designed according to performance index.The sensing mode and drive mode are analyzed based on finite element method with ANSYS softhard.The reference of analysis and correction for the designed structure is got.The Q-factor of the MEMS gyroscope is also increased.

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references

微机械双框架陀螺仪的机理研究 [J]. 邵良杰,罗晓章. 传感器技术 . 1999(05)

新颖双框架角振动微机械陀螺的制作 [J]. 陈德英. 传感器技术 . 1999(05)

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