Progress of SAW hydrogen sensor

ZHOU Jun-jing1; YIN Chen-bo1; TU Shan-dong1; Daniel Sonnleithner2

doi:10.13873/j.1000-97872007.03.001

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Progress of SAW hydrogen sensor

更新时间：2025-09-11

- Progress of SAW hydrogen sensor
- Issue 3, Pages: 1-3(2007)
- 作者机构：
  
  1. 南京工业大学机械与动力工程学院
  2. 卡尔斯鲁厄大学,江苏,南京,210009
  3. ,卡尔斯鲁厄,德国,76128
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.03.001
  CLC： TP212
- Published：2007
- 稿件说明：
移动端阅览
[1]周俊静,殷晨波,涂善东,Daniel Sonnleithner.SAW氢传感器的研究进展[J].传感器与微系统,2007(03):1-3.

ZHOU Jun-jing1, YIN Chen-bo1, TU Shan-dong1, et al. Progress of SAW hydrogen sensor[J]. 2007, (3): 1-3.
[1]周俊静,殷晨波,涂善东,Daniel Sonnleithner.SAW氢传感器的研究进展[J].传感器与微系统,2007(03):1-3. DOI： 10.13873/j.1000-97872007.03.001.

ZHOU Jun-jing1, YIN Chen-bo1, TU Shan-dong1, et al. Progress of SAW hydrogen sensor[J]. 2007, (3): 1-3. DOI： 10.13873/j.1000-97872007.03.001.

摘要

对声表面波（SAW）氢传感器的研究目前主要集中在改善其敏感性、加快响应速度、增强稳定性以及消除温度的影响。要实现这些目标

一是改善SAW氢传感器的关键部件——敏感薄膜的性能;二是改进传感器的结构。对主要研究机构在这些方面的研究进行了系统的综述

并提出了发展方向。

Abstract

The research on surface acoustic wave（SAW） hydrogen sensor is mainly focused on its sensitivity

response time

endurance

time stability and how to eliminate the affection of temperature.One method to realize these is to improve the performance of the sensitive film

and the other is to change the structure of the sensor.The progress of the research is overviewed

and the prospect is predicted.

关键词

Keywords

references

延迟线型声表面波传感器的研究 [J]. 施文康,刘艾. 传感技术学报 . 1999(04)

声表面波谐振器型振荡器的研制 [J]. 范东远,陈明. 声学技术 . 1997(02)

一种新型的声表面波有机气体检测方法￣① [J]. 戴恩光,冯冠平,何振华. 云南大学学报(自然科学版) . 1997(01)

新型声表面波气体传感器 [J]. 刘国锋,陈明. 航空计测技术 . 1995(03)

浮动零点法及其在声表面波（SAW）传感器中的应用 [J]. 陈明,李岁劳,范东远. 航空计测技术 . 1994(04)

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