Sensitivity characteristic of surface acoustic wave sensor based on conductive polymer thin film

YU Hai-yan; XIE Guang-zhong; WU Zhi-ming; JIANG Ya-dong; DU Xiao-song

doi:10.13873/j.1000-97872007.02.018

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Sensitivity characteristic of surface acoustic wave sensor based on conductive polymer thin film

更新时间：2025-09-11

- Sensitivity characteristic of surface acoustic wave sensor based on conductive polymer thin film
- Issue 2, Pages: 53-55(2007)
- 作者机构：
  
  1. 电子科技大学光电信息学院
  2. 电子科技大学光电信息学院,四川,成都,610054
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.02.018
  CLC： TP212
- Published：2007
- 稿件说明：
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[1]于海燕,谢光忠,吴志明,蒋亚东,杜晓松.导电聚合物薄膜声表面波传感器敏感特性研究[J].传感器与微系统,2007(02):53-55.

YU Hai-yan, XIE Guang-zhong, WU Zhi-ming, et al. Sensitivity characteristic of surface acoustic wave sensor based on conductive polymer thin film[J]. 2007, (2): 53-55.
[1]于海燕,谢光忠,吴志明,蒋亚东,杜晓松.导电聚合物薄膜声表面波传感器敏感特性研究[J].传感器与微系统,2007(02):53-55. DOI： 10.13873/j.1000-97872007.02.018.

YU Hai-yan, XIE Guang-zhong, WU Zhi-ming, et al. Sensitivity characteristic of surface acoustic wave sensor based on conductive polymer thin film[J]. 2007, (2): 53-55. DOI： 10.13873/j.1000-97872007.02.018.

摘要

利用旋涂方法在声表面波（SAW）器件的延迟通道上制备了酞菁铜（CuPC）掺杂的聚乙烯吡咯烷酮（PVP）敏感薄膜

并对制备的薄膜用四探针法和扫描电子显微镜（SEM）进行了测试和表征。结果表明:薄膜中的CuPC颗粒均匀分散在聚合物薄膜中

其粒径尺寸约为20 nm

薄膜的电导率在10-6Ω-1.cm-1量级。根据提出的理论模型

计算出由于敏感膜的质量变化与电导率的变化导致了中心频率的漂移

该漂移值的理论计算结果与实验验证结果相符。

Abstract

Polyvinylpyrrolidone（PVP） thin film doped copper phthalocyanine（CuPC） is fabricated on the delayline of surface acoustic wave（SAW） component by using spin coating method.The thin film is characterized by four-point probe method and scanning electron microscopy（SEM）.The results show that the CuPc particles are well dispersed in the polymeric matrix.The average size of CuPc particles in the film is about 20nm

and the electric conductivity of the thin film is about 10-6Ω-1·cm-1.According to the given theory

the shift of central frequency of SAW sensor due to the change of mass and electric conductivity of the sensitive film is calculated

the shift valum is in agreement with the experimental data.

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references

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氮氧化物化学传感器 [J]. 王康丽,严河清,刘军,王鄂凤. 武汉大学学报(理学版) . 2003(04)

声表面波SO 2 气体传感器敏感膜的研究 [J]. 魏培永,朱长纯,刘君华. 西安交通大学学报 . 2000(09)

声表面波SO 2 传感器的研制 [J]. 秦树基,刘国安,唐宗岳. 云南大学学报(自然科学版) . 1997(02)

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延迟线型声表面波气敏传感器的研究 [D]. 胡冠山. 山东大学 2005

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