Surface plasmon resonance optical sensor by using Ag-SnO<sub>2</sub> thin film

FU Yun-liang~1; YUAN Yi-fang~2; FU Jun~1; LI Tian-lüe~3

doi:10.13873/j.1000-97872007.01.018

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Surface plasmon resonance optical sensor by using Ag-SnO₂ thin film

更新时间：2025-09-11

- Surface plasmon resonance optical sensor by using Ag-SnO₂ thin film
- Issue 1, Pages: 54-55+59(2007)
- 作者机构：
  
  1. 海南师范大学物理系
  2. 上海理工大学光学与电子信息工程学院
  3. 海南师范大学化学系
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.01.018
  CLC： TP212
- Published：2007
- 稿件说明：
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[1]符运良,袁一方,傅军,李天略.表面等离子共振Ag-SnO_2薄膜光化学气体传感器[J].传感器与微系统,2007(01):54-55+59.

FU Yun-liang~1, YUAN Yi-fang~2, FU Jun~1, et al. Surface plasmon resonance optical sensor by using Ag-SnO₂ thin film[J]. 2007, (1): 54-55+59.
[1]符运良,袁一方,傅军,李天略.表面等离子共振Ag-SnO_2薄膜光化学气体传感器[J].传感器与微系统,2007(01):54-55+59. DOI： 10.13873/j.1000-97872007.01.018.

FU Yun-liang~1, YUAN Yi-fang~2, FU Jun~1, et al. Surface plasmon resonance optical sensor by using Ag-SnO₂ thin film[J]. 2007, (1): 54-55+59. DOI： 10.13873/j.1000-97872007.01.018.

摘要

提出一种新型的Ag-SnO2复合膜H2S光化学表面等离子共振（SPR）气体传感器结构。结构中使用一只金红石材料作成的棱镜作为耦合棱镜

在棱镜的底边采用射频溅射技术制作Ag-SnO2复合膜（CuO为掺杂质）

Ag膜和SnO2膜的厚度分别为50 nm和100 nm

在复合膜上设置待测气体的样品池。在白光入射激励下

复合膜的分界面发生SPR现象。实验结果表明:SPR的波长与H2S气体的体积分数基本呈线性关系。

Abstract

A novel surface plasmon resonance（SPR） H

S gas sensitive optical sensor structure coated a combined Ag-SnO

film is proposed.The Ag-SnO

combined film（CuO as the dropped impurity） is prepared by RF-reactive-sputtering deposition on rutile prism

and the thicknesss of Ag film and SnO

film are 50 nm and 100 nm respectively.A gas sample cell is set up on the surface of the combined film.Under the excitation of white light

the phenomena of SPR are occured on the demarcation surface of combined film.The experiments show that the resonance wavelength of SPR is almost linear with the H

S volume fraction.

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references

表面等离子共振金/钯复合膜氢敏传感器 [J]. 胡建东,王晓萍,文泓桥. 光学技术 . 2004(06)

射频反应溅射纳米SnO 2 薄膜气敏特性研究 [J]. 宋建将,黄世震,林伟,陈伟,黄兆新,陈知前. 漳州师范学院学报(自然科学版) . 2004(01)

射频溅射法制备掺杂SnO 2 纳米薄膜的研究 [J]. 曾志峰,于国萍,魏正和,何永华. 武汉大学学报(理学版) . 2004(01)

表面等离子体子共振光化学传感器用于葡萄糖溶液的测定 [J]. 戴春霞,陈泽忠. 湖南轻工业高等专科学校学报 . 2003(03)

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Surface plasmon resonance optical sensor by using Ag-SnO2 thin film

DOI：10.13873/j.1000-97872007.01.018

摘要

Abstract

关键词

Keywords

references

Surface plasmon resonance optical sensor by using Ag-SnO₂ thin film