Study on noise mechanism of MEMS accelerometer for petroleum exploration

WANG Jun-jie~

doi:10.13873/j.1000-97872007.01.014

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Study on noise mechanism of MEMS accelerometer for petroleum exploration

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- Study on noise mechanism of MEMS accelerometer for petroleum exploration
- Issue 1, Pages: 41-44(2007)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室
  2. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050
  3. 中国科学院研究生院
  4. ,北京,100039
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872007.01.014
  CLC： TP212
- Published：2007
- 稿件说明：
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[1]王俊杰,车录锋,吴浩,王跃林.石油勘探用MEMS加速度传感器噪声机理研究[J].传感器与微系统,2007(01):41-44.

WANG Jun-jie~. Study on noise mechanism of MEMS accelerometer for petroleum exploration[J]. 2007, (1): 41-44.
[1]王俊杰,车录锋,吴浩,王跃林.石油勘探用MEMS加速度传感器噪声机理研究[J].传感器与微系统,2007(01):41-44. DOI： 10.13873/j.1000-97872007.01.014.

WANG Jun-jie~. Study on noise mechanism of MEMS accelerometer for petroleum exploration[J]. 2007, (1): 41-44. DOI： 10.13873/j.1000-97872007.01.014.

摘要

针对石油勘探的应用需求

分析了MEMS加速度传感器及其检测电路的噪声源

并对不同电路结构的噪声进行了比较。根据分析结果

采取多种措施进行了改进

振动测试结果表明:传感器分辨力由原来的大于0.01m/s2提高到0.001m/s2

进一步提高了MEMS加速度传感器的性能。

Abstract

For the sake of petroleum exploration the noise source of MEMS accelerometer and its detection circuit is analyze.The noise of different circuits forms is compared.Some measures are taken to improve the properties of MEMS accelerometer.Its resolution is from formal 0.01 m/s

to latter 0.001 m/s

resulting from vibrating test.

关键词

Keywords

references

传感器的噪声及其抑制方法 [J]. 程军. 电子工程师 . 2003(03)

ANSYS 8.0结构分析及实例解析[M]. 机械工业出版社 , 王富耻,席巧娟等编著, 2005

电子系统中噪声的抑制与衰减技术[M]. 电子工业出版社 , (美)HenryW.Ott著, 2003

线性电子线路[M]. 中国科学技术大学出版社 , 戴蓓莊,钱志远编著, 1994

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