Micropump has a large potential for an application to microchemical analysis systems and much attention has been given to develope micropump.Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure

working principle and fabrication process

a novel piezoelectric-driven integrated microump and microvalve is developed.The construction and the fabrication process is quite simple.It consists of flexible PDMS pump diaphragm

base plate and piezo electric actuator.PDMS diaphragm

meanwhile

is a active valve whose functions are manipulating/directing/switching the flow direction（forward or backward）

and is a buffer element too.This device can work as a active valve when driving the piezoelectric actuator by a DC-voltage

and can work as micropump when driving the displacement unit in a square-wave manner.The geometry parameter

work principle and process of fabrication are given in detail.