Research on ethanol-sensing properties of silicon nanoporous pillar array

CHEN Shao-jun; YANG Guang; FENG Chun-yue; LI Xin-jian

doi:10.13873/j.1000-97872006.12.006

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Research on ethanol-sensing properties of silicon nanoporous pillar array

更新时间：2025-09-11

- Research on ethanol-sensing properties of silicon nanoporous pillar array
- Issue 12, Pages: 18-20(2006)
- 作者机构：
  
  1. 郑州大学物理系材料物理教育部重点实验室
  2. 郑州大学物理系材料物理教育部重点实验室,河南,郑州,450052
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.12.006
  CLC： TP204
- Published：2006
- 稿件说明：
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[1]陈绍军,杨光,冯春岳,李新建.硅纳米孔柱阵列的酒敏特性研究[J].传感器与微系统,2006(12):18-20.

CHEN Shao-jun, YANG Guang, FENG Chun-yue, et al. Research on ethanol-sensing properties of silicon nanoporous pillar array[J]. 2006, (12): 18-20.
[1]陈绍军,杨光,冯春岳,李新建.硅纳米孔柱阵列的酒敏特性研究[J].传感器与微系统,2006(12):18-20. DOI： 10.13873/j.1000-97872006.12.006.

CHEN Shao-jun, YANG Guang, FENG Chun-yue, et al. Research on ethanol-sensing properties of silicon nanoporous pillar array[J]. 2006, (12): 18-20. DOI： 10.13873/j.1000-97872006.12.006.

摘要

采用水热腐蚀技术制备了表面同时具有规则阵列结构和多孔结构的硅微米/纳米结构复合体系硅纳米孔柱阵列（S i-NPA）

并测试了其电阻酒敏特性。结果表明:S i-NPA对酒精具有较高的灵敏度和较快的响应时间。S i-NPA良好的酒精敏感性能被归因于S i-NPA的表面结构

即高灵敏度来自于其巨大的比表面积对酒精分子的物理吸附

而快响应时间则来源于其表面规则的硅柱阵列为气体的传输提供有效的通道。S i-NPA独特的层次结构使其有可能在未来硅基薄膜传感器等方面得到应用。

Abstract

Silicon nanoporous pillar array（Si-NPA）

a novel silicon micron/nanometer structural composite system with both regular surface pillar array and porous structure

is prepared by hydrothermal etching method and its ethanol-sensing properties are measured.Results show that Si-NPA exhibited high sensitivity and short response time to ethanol.This excellent performance of Si-NPA to ethanol is due to its surface structure

the high sensitivity originated from the physical adsorption brought by the large specific area

while the short response time come from the effective gas transportation pathway provided by the regular pillar array.The unique hierarchical structure of Si-NPA might be applied in the field of silicon-based thin film sensors in future.

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references

硅纳米孔柱阵列的结构和光学特性研究 [J]. 许海军,富笑男,孙新瑞,李新建. 物理学报 . 2005(05)

物理吸附与化学吸附 [J]. 刘大中,王锦. 山东轻工业学院学报(自然科学版) . 1999(02)

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