Structure optimization of thick film pressure sensors

CHEN Jian-qun; MA Yi-wu; ZHANG Bin

doi:10.13873/j.1000-97872006.11.019

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Structure optimization of thick film pressure sensors

更新时间：2025-09-11

- Structure optimization of thick film pressure sensors
- Issue 11, Pages: 57-60(2006)
- 作者机构：
  
  1. 中国科学院合肥智能机械研究所传感技术国家重点实验室合肥
  2. 中国科学院合肥智能机械研究所传感技术国家重点实验室合肥,安徽,230031
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.11.019
  CLC： TP212.1
- Published：2006
- 稿件说明：
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[1]陈建群,马以武,张宾.厚膜压力传感器的结构优化[J].传感器与微系统,2006(11):57-60.

CHEN Jian-qun, MA Yi-wu, ZHANG Bin. Structure optimization of thick film pressure sensors[J]. 2006, (11): 57-60.
[1]陈建群,马以武,张宾.厚膜压力传感器的结构优化[J].传感器与微系统,2006(11):57-60. DOI： 10.13873/j.1000-97872006.11.019.

CHEN Jian-qun, MA Yi-wu, ZHANG Bin. Structure optimization of thick film pressure sensors[J]. 2006, (11): 57-60. DOI： 10.13873/j.1000-97872006.11.019.

摘要

为提高厚膜压力传感器的稳定性

借助有限元分析软件Ansys

研究了厚膜压力传感器弹性体的应力分布

进而设计了应变电阻的尺寸

并优化了其布局。采用Ф18mm的96%A l2O3弹性体瓷件研制了一种新型厚膜力敏芯片

实验结果表明:它的热零点温漂小于3×10-4FS/℃

过载达120%

非线性误差及迟滞误差都小于±0.2%FS

精度由±0.4%FS提高到±0.2%FS

其线性度和稳定性得到很大提高

可广泛应用于仪器仪表、测控和导航等领域。

Abstract

To improve the stability of the thick film pressure sensors

their elastomeric stress distribution is studied by finite element analysis（FEA） software Ansys.Thus the strain gauge dimension is designed and their location is optimized.A new-style thick film pressure sensor is manufactured from Ф18 mm

96 %Al

elastomeric ceramic.Experimental results indicate that its zero drift is less than ±0.3 %FS/℃

its over loading is 120 %

its non-linearity and hysteresis error are less than ±0.2 %FS

and its precision is up to ±0.2 %FS from ±0.4 %FS.The thick film pressure sensors linearity and stability are largely improved.Therefore

the thick film pressure sensors can be used in scientific instrument

measure and control and aeronautical instrument field.

关键词

Keywords

references

端盖压头仿真与研制 [J]. 申光宪,谢京强,李明,左大为. 测试技术学报 . 2003(03)

压阻传感器信号调理的解决方案 [J]. 王美玲. 仪表技术与传感器 . 2002(06)

厚膜微压力传感器的研究 [J]. 马以武,常慧敏,宋箭,王英先,虞承端. 仪表技术与传感器 . 1999(06)

智能传感器系统[M]. 西安电子科技大学出版社 , 刘君华编著, 1999

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