Study on optical and hydrogen sensing properties of nanocrystalline WO<sub>3</sub> films

YANG Xiao-hong~

doi:10.13873/j.1000-97872006.11.004

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Study on optical and hydrogen sensing properties of nanocrystalline WO₃ films

更新时间：2025-09-11

- Study on optical and hydrogen sensing properties of nanocrystalline WO₃ films
- Issue 11, Pages: 12-14(2006)
- 作者机构：
  
  1. 重庆大学应用物理系
  2. 重庆大学机械工程学院
  3. 重庆师范大学物理学与信息技术学院,重庆,400044
  4. ,重庆,400047
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.11.004
  CLC： TB383.1;TN304
- Published：2006
- 稿件说明：
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[1]杨晓红,王新强,唐一科,马勇.纳米WO_3薄膜的光学性质及氢敏特性研究[J].传感器与微系统,2006(11):12-14.

YANG Xiao-hong~. Study on optical and hydrogen sensing properties of nanocrystalline WO₃ films[J]. 2006, (11): 12-14.
[1]杨晓红,王新强,唐一科,马勇.纳米WO_3薄膜的光学性质及氢敏特性研究[J].传感器与微系统,2006(11):12-14. DOI： 10.13873/j.1000-97872006.11.004.

YANG Xiao-hong~. Study on optical and hydrogen sensing properties of nanocrystalline WO₃ films[J]. 2006, (11): 12-14. DOI： 10.13873/j.1000-97872006.11.004.

摘要

采用磁控直流溅射法制备出纳米WO3薄膜

在N2气中进行退火处理。采用分光光度计、XRD等对退火前后的WO3薄膜进行了光学特性的分析。研究表明:在623 K进行退火处理的薄膜均匀、致密

呈现出较好的结晶态。采用光源激发对纯WO3薄膜在不同温度条件下的氢敏特性进行了研究

实验显示:WO3薄膜对H2的敏感性与温度有关

在348 K温度条件下

WO3薄膜的氢敏效应最好。

Abstract

Nanocrystalline WO

films are prepared by DC magnetron sputtering technique

and then annealed in N

at different temperature.The structure and optical properties of the WO

films are studied by XRD and spectrophotometer.The experimental results show that the films exhibit better crystallinity with the annealing temperatures higher than 623 K

and crystalline WO

films show better optical property.The sensing properties of the WO

films to hydrogen gas are studied at different working temperatures.It is found that the sensitivity of pure WO

sensors is dependent on working temperature and the films response gets the greatest at 348 K.

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非晶态WO 3 薄膜电致变色特性的研究 [J]. 代富平,吕淑媛,冯博学,蒋生蕊,陈冲. 物理学报 . 2003(04)

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Physics & Information College,Chongqing Normal University

⁰

Study on optical and hydrogen sensing properties of nanocrystalline WO3 films

DOI：10.13873/j.1000-97872006.11.004

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Study on optical and hydrogen sensing properties of nanocrystalline WO₃ films