Application of photoetching technology on the fabrication electrodes made PVDF piezoelectric-film

HE Cun-fu; FENG Xi-wang; WU Bin; WANG Xiu-yan; LI Long-tao

doi:10.13873/j.1000-97872006.10.025

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Application of photoetching technology on the fabrication electrodes made PVDF piezoelectric-film

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- Application of photoetching technology on the fabrication electrodes made PVDF piezoelectric-film
- Issue 10, Pages: 76-78(2006)
- 作者机构：
  
  1. 北京工业大学机电学院
  2. 北京工业大学机电学院,北京,100022
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.10.025
  CLC： TB383.2
- Published：2006
- 稿件说明：
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[1]何存富,冯喜旺,吴斌,王秀彦,李隆涛.光刻技术在PVDF压电薄膜电极制作中的应用[J].传感器与微系统,2006(10):76-78.

HE Cun-fu, FENG Xi-wang, WU Bin, et al. Application of photoetching technology on the fabrication electrodes made PVDF piezoelectric-film[J]. 2006, (10): 76-78.
[1]何存富,冯喜旺,吴斌,王秀彦,李隆涛.光刻技术在PVDF压电薄膜电极制作中的应用[J].传感器与微系统,2006(10):76-78. DOI： 10.13873/j.1000-97872006.10.025.

HE Cun-fu, FENG Xi-wang, WU Bin, et al. Application of photoetching technology on the fabrication electrodes made PVDF piezoelectric-film[J]. 2006, (10): 76-78. DOI： 10.13873/j.1000-97872006.10.025.

摘要

为了在聚偏二氟乙烯（PVDF）压电薄膜上得到特定形状和尺寸的金电极

利用光刻技术的基本原理

分别实施了2种制备方案

即正性胶保护法和负性胶保护法。实验结果表明:负性胶保护法不能用于PVDF压电薄膜金电极的制作

而正性胶保护法能够成功地完成PVDF压电薄膜上金电极的制作

并已经成功地应用于高频超声换能器研制中。

Abstract

Based on the principle of phototeching technology

two different projects

namely positive resist protection and negative resist protection

are performed to realize the preparation of the golden electrodes with special shape and dimension on the PVDF piezoelectric film.The experimental results indicate that we can obtain the ideal golden electrodes only in the project of positive resist protection

not in the project of negative resist protection.The PVDF piezoelectric film with the golden electrodes can used in the manufacture of high-frequency ultrasonic sensor.

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references

光刻技术在流体动力密封研究中的应用 [J]. 宁建华. 火箭推进 . 2005(04)

线路板制作中的网印技术 [J]. 李锋. 丝网印刷 . 2005(05)

基于光刻技术微小型电极的制作 [J]. 周耀华,王西彬,崔芳,贾玉萍. 机械工程师 . 2005(01)

聚偏二氟乙烯（PVDF）特性及其在过程工业中应用 [J]. 卓震. 腐蚀科学与防护技术 . 2004(02)

MEMS螺线管型电感器正负胶结合的加工工艺 [J]. 吴茂松,杨春生,茅昕辉,赵小林,蔡炳初. 微细加工技术 . 2002(02)

(PVDF)压电塑料的特性及其应用 [J]. 王朋李,王秀. 山东轻工业学院学报(自然科学版) . 1998(01)

MEMS技术及其应用[M]. 哈尔滨工业大学出版社 , 李德胜等编著, 2002

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