A pendulous micromachined silicon accelerometer

WU Zheng-wei~

doi:10.13873/j.1000-97872006.08.030

Chinese

您当前的位置：

首页 >

文章列表页 >

A pendulous micromachined silicon accelerometer

更新时间：2025-09-11

- A pendulous micromachined silicon accelerometer
- Issue 8, Pages: 85-88(2006)
- 作者机构：
  
  1. 中国科学院电子学研究所传感技术国家重点实验室
  2. 中国科学院电子学研究所传感技术国家重点实验室,北京,100080
  3. 中国科学院研究生院
  4. ,北京,100039
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.08.030
  CLC： TP212
- Published：2006
- 稿件说明：
移动端阅览
[1]毋正伟,陈德勇,杨苗苗,徐磊.一种扭摆式硅微机械加速度传感器[J].传感器与微系统,2006(08):85-88.

WU Zheng-wei~. A pendulous micromachined silicon accelerometer[J]. 2006, (8): 85-88.
[1]毋正伟,陈德勇,杨苗苗,徐磊.一种扭摆式硅微机械加速度传感器[J].传感器与微系统,2006(08):85-88. DOI： 10.13873/j.1000-97872006.08.030.

WU Zheng-wei~. A pendulous micromachined silicon accelerometer[J]. 2006, (8): 85-88. DOI： 10.13873/j.1000-97872006.08.030.

摘要

介绍了一种基于体硅微机电系统（MEMS）工艺制作的扭摆式硅微机械加速度传感器

对制作过程的一些工艺问题进行探讨

并提出相应的解决办法

主要涉及到硅-玻璃阳极键合、结构释放等关键工艺。对测试结果进行了初步分析

分辨力可以达到1mgn

测试±1gn范围内线性度可以达到99.99%。

Abstract

A pendulous micromachined silicon accelerometer is introduced based on bulk silicon MEMS technique

the ways of solving some technique problems in production process are explored

such as the anodic bonding of silicon and pgrex

structure etching and structure release.Test datas show that the resolution of system is 1 mg

linearity is 99.99 % at the range of ±1 g

关键词

Keywords

references

微硅高g加速度传感器工艺研究 [J]. 张中平. 仪表技术与传感器 . 2002(04)

Views

165

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Virtual reality touring system based on MEMS sensor

Study on multi-stack anodic bonding using two electrodes

Application of MEMS accelerometer on micro-robots

Research on novel MEMS shock accelerometer

Proving ground road identification system based on MEMS sensor

Related Author

XU Xun

LIU Yu-sheng

ZHANG Ting-kai

GAN Zhi-yin

ZHANG Hong-hai

CHEN Wei1

YANG Zhong1

XIA Yu-liang2

Related Institution

School of Electrical Engineering,Sichuan University

Wuhan National Laboratory for Optoelectronics,Institute of Microsystems,School of Mechanical Science and Technology,Huazhong University of Science and Technology

College of Automation,Nanjing University of Aeronautics and Astronautics

Nanjing Panda Electronics Manufacture Co.Ltd

Department of Aviation Control,AviationUniversity of Air Force

⁰