Study on piezoelectric micropump driven based on MEMS technology

WANG Hai-ning; CUI Da-fu; GENG Zhao-xin; CHEN Xing

doi:10.13873/j.1000-97872006.08.029

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Study on piezoelectric micropump driven based on MEMS technology

更新时间：2025-09-11

- Study on piezoelectric micropump driven based on MEMS technology
- Issue 8, Pages: 82-84+88(2006)
- 作者机构：
  
  1. 中国科学院电子学研究所传感技术国家重点实验室
  2. 中国科学院电子学研究所传感技术国家重点实验室,北京,100080
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.08.029
  CLC： TH703
- Published：2006
- 稿件说明：
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[1]王海宁,崔大付,耿照新,陈兴.一种基于MEMS技术的压电微泵的研究[J].传感器与微系统,2006(08):82-84+88.

WANG Hai-ning, CUI Da-fu, GENG Zhao-xin, et al. Study on piezoelectric micropump driven based on MEMS technology[J]. 2006, (8): 82-84+88.
[1]王海宁,崔大付,耿照新,陈兴.一种基于MEMS技术的压电微泵的研究[J].传感器与微系统,2006(08):82-84+88. DOI： 10.13873/j.1000-97872006.08.029.

WANG Hai-ning, CUI Da-fu, GENG Zhao-xin, et al. Study on piezoelectric micropump driven based on MEMS technology[J]. 2006, (8): 82-84+88. DOI： 10.13873/j.1000-97872006.08.029.

摘要

介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷（PDMS）作为泵膜

使用了一个主动阀和一个被动阀

并利用压电双晶片作为驱动部件。压电双晶片和PDMS泵膜的组合可以产生较大的泵腔体积改变和压缩比

显著降低了加工成本

并提高了成品率。对压电微泵的输出流量进行了测试

结果显示:电压、频率以及背压对流量均有显著影响。在100 V

25Hz的方波驱动下

该压电微泵的最大输出流量为458μL/m in

最大输出压力为6 kPa。

Abstract

A piezoelectric micropump based on MEMS technology is presented.Polydimethylsiloxane（PDMS） is utilized to form the diaphragm

a passive valve and an active valve are formed by anisotropic etching of bulk silicon

and a piezoelectric bimorph is used as the actuator.The combination of piezoelectric bimorph and PDMS diaphragm can bring large chamber volume change

reduce the manufacture cost and increase the yields.The flow rates of the micropump are measured

and the result shows that the voltage

frequency and the back pressure all have an influence to the flow rates.When a square wave of 100 V and 25 Hz is applied

the flow rate of piezoelectric micropump reaches to 458 μL/min

and a maximum output pressure of 6 kPa is produced.

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Keywords

references

基于硅结构的微流体控制系统 [J]. 程秀兰,蔡炳初,徐东,陈鉴,王莉. 微细加工技术 . 2002(02)

微流控分析芯片[M]. 科学出版社 , 方肇伦等编著, 2003

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Related Institution

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中国科学院研究生院

School of Microelectronics, University of Science and Technology of China

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute,Chinese Academy of Sciences

Department of Neurosurgery,Fourth Medical Center, Chinese PLA General Hospital

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