Fabrication and properties of ZnSnO<sub>3</sub> gas sensing thin film

ZENG Yu-ping~1; GAO Zhao-fen~2; SHEN He-sheng~3

doi:10.13873/j.1000-97872006.07.023

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Fabrication and properties of ZnSnO₃ gas sensing thin film

更新时间：2025-09-11

- Fabrication and properties of ZnSnO₃ gas sensing thin film
- Issue 7, Pages: 70-72(2006)
- 作者机构：
  
  1. 中国科学院上海硅酸盐研究所
  2. 上饶师范学院化学系
  3. 上海交通大学微纳米科学技术研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.07.023
  CLC： TN304.05
- Published：2006
- 稿件说明：
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[1]曾宇平,高兆芬,沈荷生.ZnSnO_3气敏薄膜的制备和性能[J].传感器与微系统,2006(07):70-72.

ZENG Yu-ping~1, GAO Zhao-fen~2, SHEN He-sheng~3. Fabrication and properties of ZnSnO₃ gas sensing thin film[J]. 2006, (7): 70-72.
[1]曾宇平,高兆芬,沈荷生.ZnSnO_3气敏薄膜的制备和性能[J].传感器与微系统,2006(07):70-72. DOI： 10.13873/j.1000-97872006.07.023.

ZENG Yu-ping~1, GAO Zhao-fen~2, SHEN He-sheng~3. Fabrication and properties of ZnSnO₃ gas sensing thin film[J]. 2006, (7): 70-72. DOI： 10.13873/j.1000-97872006.07.023.

摘要

利用共沉淀法制备了ZnSnO3粉体

通过直流溅射制备了气敏薄膜。研究了老化温度、薄膜的组成对气体的灵敏度影响。实验结果表明:600℃老化后

气敏膜薄膜的主要成分是ZnSnO3

在450℃时

该薄膜对乙醇灵敏度约为650

有望开发成酒敏元件。

Abstract

ZnSnO

powder is prepared by co-precipitation

and gas sensing thin film is fabricated via direct current sputtering.The influences of the annealing temperatures and the composition of the thin films on the sensitivity of gas are investigated.The experimental results show that the main composition of the thin film annealed at 600 ℃ is ZnSnO

the sensitivity of the thin film for ethanol measured at 450 ℃ is 650

ZnSnO

is a hopeful candidate material for ethanol sensor.

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references

ZnO气敏材料的研究进展 [J]. 祝柏林,谢长生. 传感技术学报 . 2002(04)

提高乙醇气敏传感器性能的途径 [J]. 张英,张继伦. 传感技术学报 . 2002(01)

纳米材料SnO 2 的室温固相合成及其气敏特性 [J]. 胡平,徐甲强,刘艳丽. 传感器技术 . 2001(09)

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⁰

Fabrication and properties of ZnSnO3 gas sensing thin film

DOI：10.13873/j.1000-97872006.07.023

摘要

Abstract

关键词

Keywords

references

Fabrication and properties of ZnSnO₃ gas sensing thin film