Application of Michelson micro-interference principle in the surface profile measuring

SUN Yan-ling

doi:10.13873/j.1000-97872006.07.017

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Application of Michelson micro-interference principle in the surface profile measuring

更新时间：2025-09-11

- Application of Michelson micro-interference principle in the surface profile measuring
- Issue 7, Pages: 52-54(2006)
- 作者机构：
  
  湖北襄樊学院机械工程系湖北襄樊,441053
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.07.017
  CLC： TG84
- Published：2006
- 稿件说明：
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[1]孙艳玲.迈克尔逊干涉原理在表面形貌测量中的应用研究[J].传感器与微系统,2006(07):52-54.

SUN Yan-ling. Application of Michelson micro-interference principle in the surface profile measuring[J]. 2006, (7): 52-54.
[1]孙艳玲.迈克尔逊干涉原理在表面形貌测量中的应用研究[J].传感器与微系统,2006(07):52-54. DOI： 10.13873/j.1000-97872006.07.017.

SUN Yan-ling. Application of Michelson micro-interference principle in the surface profile measuring[J]. 2006, (7): 52-54. DOI： 10.13873/j.1000-97872006.07.017.

摘要

介绍了一种用于被测件表面形貌的测量分析系统

采用迈克尔逊显微干涉原理实现对表面形貌特征的快速、非接触测量

主要讨论了仪器的测量光路、横向工作台的粗、精两级驱动和信号的四细分处理

经实验证明:测量的相对误差为±0.39%。

Abstract

A measuring-analysing system for surface profile based on the Michelson micro-interference principle is described.This instrument can realize a quick and non-contact measurement with high accuracy.Principle of measuring

4 double frequency processing of photoelectric signal and a set of fine-rough two-grade driving of the horizontal platform are discussed.The experimental

results show that relative error is within±0.39 %.

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references

表面形貌光学法测量技术 [J]. 冯斌,王建华. 计量与测试技术 . 2005(06)

以正交衍射光栅为计量标准器的二维微位移工作台 [J]. 王选择,郭军,谢铁邦. 光学精密工程 . 2003(05)

微型激光干涉仪应用于纳米测量机 [J]. 陈津平,张宝峰,胡晓东,胡小唐. 计量技术 . 2002(04)

表面粗糙度、表面微观轮廓及微位移激光测量集成化方法的研究 [J]. 李文杰,张涛,黄伟. 四川大学学报(工程科学版) . 2000(06)

基于PC总线的位置测量与电机控制卡 [J]. 许慧斌,张小波,宾鸿赞. 电子与自动化 . 1999(03)

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