Improvement of RF MEMS switch in sacrificial layer process

CAI Miao; GUO Xing-long; LIU Lei; CHEN Jin-jin; LAI Zong-sheng

doi:10.13873/j.1000-97872006.07.013

Chinese

您当前的位置：

首页 >

文章列表页 >

Improvement of RF MEMS switch in sacrificial layer process

更新时间：2025-09-11

- Improvement of RF MEMS switch in sacrificial layer process
- Issue 7, Pages: 40-42(2006)
- 作者机构：
  
  1. 华东师范大学微电子电路与系统研究所
  2. 华东师范大学微电子电路与系统研究所,上海,200062
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.07.013
  CLC： TM564
- Published：2006
- 稿件说明：
移动端阅览
[1]蔡描,郭兴龙,刘蕾,陈瑾瑾,赖宗声.RF MEMS开关在牺牲层工艺上的改进[J].传感器与微系统,2006(07):40-42.

CAI Miao, GUO Xing-long, LIU Lei, et al. Improvement of RF MEMS switch in sacrificial layer process[J]. 2006, (7): 40-42.
[1]蔡描,郭兴龙,刘蕾,陈瑾瑾,赖宗声.RF MEMS开关在牺牲层工艺上的改进[J].传感器与微系统,2006(07):40-42. DOI： 10.13873/j.1000-97872006.07.013.

CAI Miao, GUO Xing-long, LIU Lei, et al. Improvement of RF MEMS switch in sacrificial layer process[J]. 2006, (7): 40-42. DOI： 10.13873/j.1000-97872006.07.013.

摘要

通过对传统的RFMEMS开关采取在信号线上电镀桥墩、改进桥梁的形状以及在桥背面设计接触点的新颖方法

使得RF MEMS开关的下拉电压减小、开关时间缩短和可靠性提高。在工艺上

特别采用了对聚酰亚胺牺牲层进行全刻蚀和半刻蚀的改进加工流程来实现桥背面的接触点。测试结果表明:开关的下拉电压为28V

最低开关时间为0.8μs

开关寿命达7×105次

0GHz的插入损耗在0

.5 dB

隔离度为35

5 dB。

Abstract

Some novel improvements

such as electroplating the pier on the signal line

remodeling the shape of membrane and designing contact bulges under the bridge are used to reduce the pull-down DC voltage

shorten the switching time and enhance the reliability of RF MEMS switch.The contact bulges under the bridge are achieved by the full etching and partial etching of the polyimide sacrificial layer.The results are obtained through this processing with 28 VDC of decreased pull-down voltage

almost 7×10

times of the switch lifetime

0.8 μs of the lowest switching time

.5 dB of the insertion loss and 35

5 dB of the isolation loss under 10 GHz.

关键词

Keywords

references

RF/MW MEMS开关中聚酰亚胺的牺牲层技术研究 [J]. 胡梅丽,赖宗声,茅惠兵,忻佩胜,沈德新. 微电子学 . 2005(01)

MEMS悬臂式开关的失效分析 [J]. 徐欣,郭方敏,葛羽屏,李成诗,于绍欣,朱荣锦,赖宗声,朱自强,王跃林,陆卫. 传感技术学报 . 2004(03)

湿度传感器用聚酰亚胺材料亚胺化工艺研究 [J]. 谢琼,杨文,常爱民,康健. 应用化工 . 2003(06)

聚酰亚胺在MEMS中的特性研究及应用 [J]. 邓俊泳,冯勇建. 微纳电子技术 . 2003(04)

Views

220

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research and fabrication of MEMS thin-film heat flux sensor

Design and fabrication of polyimide adiabatic suspension structure

Related Author

LI Juan

ZHANG Congchun

YANG Shenyong

DING Guifu

DONG Wei

DUAN Li

LI Shao-liang

XU Jing

Related Institution

National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University

Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

School of Mechanical Engineering,Shanghai Jiao Tong University

State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences

University of Chinese Academy of Sciences

⁰