Temperature compensation of mono crystal silicon pressure sensor

WANG Shi-qing; JIANG Tong; HOU Zhan-min

doi:10.13873/j.1000-97872006.07.011

Chinese

您当前的位置：

首页 >

文章列表页 >

Temperature compensation of mono crystal silicon pressure sensor

更新时间：2025-09-11

- Temperature compensation of mono crystal silicon pressure sensor
- Issue 7, Pages: 33-35+39(2006)
- 作者机构：
  
  1. 中国电子科技集团公司第四十九研究所
  2. 中国电子科技集团公司第四十九研究所,黑龙江,哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.07.011
  CLC： TP212
- Published：2006
- 稿件说明：
移动端阅览
[1]王世清,姜彤,侯占民.单晶硅压力传感器温度漂移的补偿方法[J].传感器与微系统,2006(07):33-35+39.

WANG Shi-qing, JIANG Tong, HOU Zhan-min. Temperature compensation of mono crystal silicon pressure sensor[J]. 2006, (7): 33-35+39.
[1]王世清,姜彤,侯占民.单晶硅压力传感器温度漂移的补偿方法[J].传感器与微系统,2006(07):33-35+39. DOI： 10.13873/j.1000-97872006.07.011.

WANG Shi-qing, JIANG Tong, HOU Zhan-min. Temperature compensation of mono crystal silicon pressure sensor[J]. 2006, (7): 33-35+39. DOI： 10.13873/j.1000-97872006.07.011.

摘要

介绍了单晶硅压力传感器温度漂移的机理

阐述了采取串并联电阻网络和有源电路分段等综合补偿方法的补偿原理。实验结果表明:在-45

5℃温区内

补偿后

热零点漂移和热灵敏度漂移从±0.5%FS/℃提高到±0.014%FS/℃。

Abstract

Temperature drift principle of mono crystal silicon pressure sensor is introduced

the principle and the detail compensation method of the series-parallel connection resistance net and impassive subsection synthesize way is described.The results of the experiment show that in the temperature range of-45～85 ℃

the temperature drift of off set of the sensor and the temperature drift of sensitivity of sensor is improved from ±0.5 %FS/℃ to（±0.014 %FS/℃）.

关键词

Keywords

references

传感器及其应用手册[M]. 机械工业出版社 , 孙宝元,杨宝清主编, 2004

Views

330

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Study on dynamic compensation of Wiener sensor based on inverse model identification

Design of microhumidity sensor with environmental temperature self-compensation function

New method for signal conditioning of non-standardized sensors

Enhanced NO sensor based on Pt nanoparticle-modified La_0.8Sr_0.2FeO₃

Trivalent chromium ion detection sensor based on quartz crystal microbalance

Related Author

CHEN Zhan-ping

YU Jin1

MA Qin2

ZHANG Hong-quan2

LI Xian-ming

ZHANG Yu-lin

LI Jian-tian

WANG Jie

Related Institution

School of Computer Science and Technology,Nanjing Normal University

Audit Center of Military Project of National Defense Science and Industry Bureau

Harbin Engineering University

School of Control Science & Engineering,Shandong University

山东大学控制科学与工程学院

⁰