A novel alignment method based on the four-quadrant photo electric detector

WANG Xiu-qing ~

doi:10.13873/j.1000-97872006.07.004

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A novel alignment method based on the four-quadrant photo electric detector

更新时间：2025-09-11

- A novel alignment method based on the four-quadrant photo electric detector
- Issue 7, Pages: 11-14(2006)
- 作者机构：
  
  1. 中国科学院自动化研究所复杂系统与智能科学实验室
  2. 中国科学院自动化研究所复杂系统与智能科学实验室,北京,100080
  3. 河北师范大学职业技术学院
  4. ,河北,石家庄,050031
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.07.004
  CLC： TN36
- Published：2006
- 稿件说明：
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[1]王秀青,徐德,谭民,刘云.一种基于四象限光电探测器的对准新方法[J].传感器与微系统,2006(07):11-14.

WANG Xiu-qing ~. A novel alignment method based on the four-quadrant photo electric detector[J]. 2006, (7): 11-14.
[1]王秀青,徐德,谭民,刘云.一种基于四象限光电探测器的对准新方法[J].传感器与微系统,2006(07):11-14. DOI： 10.13873/j.1000-97872006.07.004.

WANG Xiu-qing ~. A novel alignment method based on the four-quadrant photo electric detector[J]. 2006, (7): 11-14. DOI： 10.13873/j.1000-97872006.07.004.

摘要

在分析四象限光电探测器工作原理的基础上

提出了一种利用2个四象限光电探测器实现掩模板对准的新方法。激光器与四象限探测器位置固定

掩模板处于激光器与四象限探测器之间。透过掩模板上的2个透光米字形标记

激光光束照射到四象限探测器的光敏面。根据2个四象限探测器的输出

计算出掩模板的位置和姿态偏差

通过运动平台调整掩模板的位置和姿态

实现对准。

Abstract

After the working principle of the four-quadrant photo-detector is analyzed in detailed

a novel alignment method which is used to realize the mask-plate alignment by two four-quadrant photo electric detectors is provided.The location of the lasers and the four-quadrant photo-detectors are fixed

the mask-plate is between the lasers and the four-quadrant photo electric detectors.Through the two transparent reticle prealignment marks

the laser beam is projected on the active area of the four-quadrant photo electric detectors.According to the output signals of the four-quadrant photo electric detectors

the position of mask-plate and pose errors are calculated.So the position and pose of mask-plate are adjusted by an adjustable table to realize alignment.

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references

采用四象限探测器的双轴跟踪控制技术 [J]. 王岱,杨世洪. 光电工程 . 2003(05)

机载武器四象限测角制导新算法 [J]. 张洪建,方斌,李伟仁. 激光与红外 . 2002(06)

光学光刻技术的发展历程及趋势 [J]. 王相森. 微处理机 . 2002(04)

快速倾斜反射镜精跟踪系统 [J]. 万敏,张家如,聂文杰,周克恩,于真,张蓉,张凯. 激光与红外 . 1999(03)

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