Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor

TANG Li-qiang; LI Min-qiang; CHEN Jian-qun; ZHANG Bin; WANG Ying-xian

doi:10.13873/j.1000-97872006.06.013

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Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor

更新时间：2025-09-11

- Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor
- Issue 6, Pages: 39-42(2006)
- 作者机构：
  
  1. 中国科学院合肥智能机械研究所传感技术国家重点实验室
  2. 中国科学院合肥智能机械研究所传感技术国家重点实验室,安徽,合肥,230031
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.06.013
  CLC： TP212
- Published：2006
- 稿件说明：
移动端阅览
[1]唐力强,李民强,陈建群,张宾,王英先.新型厚膜陶瓷电容式压力传感器感压元件研究[J].传感器与微系统,2006(06):39-42.

TANG Li-qiang, LI Min-qiang, CHEN Jian-qun, et al. Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor[J]. 2006, (6): 39-42.
[1]唐力强,李民强,陈建群,张宾,王英先.新型厚膜陶瓷电容式压力传感器感压元件研究[J].传感器与微系统,2006(06):39-42. DOI： 10.13873/j.1000-97872006.06.013.

TANG Li-qiang, LI Min-qiang, CHEN Jian-qun, et al. Research on pressure sensitive component of novel thick film ceramic capacitive pressure sensor[J]. 2006, (6): 39-42. DOI： 10.13873/j.1000-97872006.06.013.

摘要

采用厚膜传感技术研制新型陶瓷电容式压力传感器

重点开展厚膜陶瓷电容感压元件的制备工艺和混合集成化研究。详细阐述了双电容感压元件的工作原理、结构设计、工艺制备方法及性能测试。试验结果表明:研制的感压元件性能良好

非线性误差低于1.0%

迟滞误差小于0.5%

测试电容和参考电容温度系数近乎一致。

Abstract

Novel ceramic capacitive pressure sensors（CCPS） are researched by the thick film sensitive technology.The preparation technique and hybrid integration of the pressure sensitive component are emphasized.The basic principle

fabric design

manufacturing technique and performance test of dualcapacity pressure sensitive component are described in detail.Experimental results indicate that the component has excellent performance

the non-linearity error and hysteresis error are within 1.0 % and 0.5 % respectively

especially

both temperature coefficient of capacity（TCC） are identical.

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Keywords

references

智能传感器系统[M]. 西安电子科技大学出版社 , 刘君华编著, 1999

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