MEMS infrared source and application

WU Fei-die; JI Xin-ming; WANG Jian-ye; WANG Guo-xun; HUANG Yi-ping

doi:10.13873/j.1000-97872006.05.026

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MEMS infrared source and application

更新时间：2025-09-11

- MEMS infrared source and application
- Issue 5, Pages: 78-80(2006)
- 作者机构：
  
  1. 复旦大学微电子学系
  2. 复旦大学微电子学系,上海,200433
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.05.026
  CLC： TM923
- Published：2006
- 稿件说明：
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[1]吴飞蝶,纪新明,王建业,王国勋,黄宜平.MEMS红外光源及应用[J].传感器与微系统,2006(05):78-80.

WU Fei-die, JI Xin-ming, WANG Jian-ye, et al. MEMS infrared source and application[J]. 2006, (5): 78-80.
[1]吴飞蝶,纪新明,王建业,王国勋,黄宜平.MEMS红外光源及应用[J].传感器与微系统,2006(05):78-80. DOI： 10.13873/j.1000-97872006.05.026.

WU Fei-die, JI Xin-ming, WANG Jian-ye, et al. MEMS infrared source and application[J]. 2006, (5): 78-80. DOI： 10.13873/j.1000-97872006.05.026.

摘要

针对传统红外光源需要另加调制部件

使得传感体系价高和笨重的不足

利用微电子工艺研制了一种用于便携式非扩散红外气体传感器的电调制红外光源

并对其辐射特性进行了测试。将光源应用于自行搭建的小型红外吸收气体传感系统中

对不同气体体积分数的CO2和SO2气体进行探测

测量精度分别达到20×10-6和50×10-6气体体积分数。重复测量偏差在10%之内

且光源辐射性能稳定

可用于多组分气体探测。

Abstract

An electrically modulated infrared source typically used in non-dispersive infrared gas sensor is designed by micromachining technologies to replace the traditional infrared sources where modulating components is required

which made the infrared detecting system both expensive and unwieldy.The source is applied in the portable intrared gas sensor to detect different volume fraction of CO

and SO

gases

and precision is 20×10

-6

and 50×10

-6

respectively

also repeatability less than 10 %.The source could be applied to multi-gas detection development.

关键词

Keywords

references

电调制非分光红外（NDIR）气体传感器 [J]. 熊友辉,蒋泰毅. 仪表技术与传感器 . 2003(11)

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