Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever

WANG Ling-yun; CHEN Yi-hua; SUN Dao-heng

doi:10.13873/j.1000-97872006.05.020

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Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever

更新时间：2025-09-11

- Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever
- Issue 5, Pages: 61-63+66(2006)
- 作者机构：
  
  1. 厦门大学机电工程系
  2. 厦门大学机电工程系,福建,厦门,361005
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.05.020
  CLC： V241.5
- Published：2006
- 稿件说明：
移动端阅览
[1]王凌云,陈义华,孙道恒.基于隧道效应振动梁式陀螺仪自检电极设计[J].传感器与微系统,2006(05):61-63+66.

WANG Ling-yun, CHEN Yi-hua, SUN Dao-heng. Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever[J]. 2006, (5): 61-63+66.
[1]王凌云,陈义华,孙道恒.基于隧道效应振动梁式陀螺仪自检电极设计[J].传感器与微系统,2006(05):61-63+66. DOI： 10.13873/j.1000-97872006.05.020.

WANG Ling-yun, CHEN Yi-hua, SUN Dao-heng. Design of self-test electrode for tunneling-based gyroscope with vibrating cantilever[J]. 2006, (5): 61-63+66. DOI： 10.13873/j.1000-97872006.05.020.

摘要

在微机电系统内建立自检系统是提高系统运行可靠性、安全性的重要手段之一。陀螺仪中的Coriolis力和其他惯性力存在一定的差别

即使在恒定的角速度输入下

Coriolis力也是一种动态变化的力。通过一对平板电极

其中

一个平板电极的边缘按照一定的函数变化

当陀螺仪的悬臂梁振动时

其平板间的静电力的变化能很好地模拟陀螺仪中的Coriolis力

有限元分析结果也表明:应用该方法完全能实现陀螺的自检和测试。

Abstract

One of important way to improve the reliability and safety of MEMS is to use a built-in self-test.There are some differences between Coriolis force and other inertial force in gyroscope.The Coriolis force is dynamic

although the angular rate is constant.A pair of plate electrodes is used

the boundary of one of them changes according to a special function.When the gyroscope’s cantilever oscillates

the electrostatic force between the two plate electrodes can perfectly simulate the Coriolis force in qyrosoope.The result of finite element analysis（FEA） also indicates this design can be used to realize the aim of self-testing in the gyroscope.

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