Temperature compensation of pulse image sensor formed on the silicon cantilever beam

WANG Bing-li; LI Dian-mei; WANG Lu; YANG Zhi; WEN Dian-zhong

doi:10.13873/j.1000-97872006.04.008

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Temperature compensation of pulse image sensor formed on the silicon cantilever beam

更新时间：2025-09-11

- Temperature compensation of pulse image sensor formed on the silicon cantilever beam
- Issue 4, Pages: 24-25+28(2006)
- 作者机构：
  
  1. 黑龙江大学集成电路重点实验室
  2. 黑龙江大学集成电路重点实验室,黑龙江,哈尔滨,150080
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.04.008
  CLC： TP212
- Published：2006
- 稿件说明：
移动端阅览
[1]王丙利,李点美,王璐,杨志,温殿忠.硅悬臂梁脉象传感器温度补偿[J].传感器与微系统,2006(04):24-25+28.

WANG Bing-li, LI Dian-mei, WANG Lu, et al. Temperature compensation of pulse image sensor formed on the silicon cantilever beam[J]. 2006, (4): 24-25+28.
[1]王丙利,李点美,王璐,杨志,温殿忠.硅悬臂梁脉象传感器温度补偿[J].传感器与微系统,2006(04):24-25+28. DOI： 10.13873/j.1000-97872006.04.008.

WANG Bing-li, LI Dian-mei, WANG Lu, et al. Temperature compensation of pulse image sensor formed on the silicon cantilever beam[J]. 2006, (4): 24-25+28. DOI： 10.13873/j.1000-97872006.04.008.

摘要

阐述了采用硅悬臂梁制造的脉象传感器结构、设计和温度补偿原理。实验结果表明:补偿后的传感器具有灵敏度高、稳定性好

线性度为1%FS（0

N）

重复性为0.5%FS

灵敏度为50 mV/N。给出的温度补偿晶体管对该脉象传感器的灵敏度温度漂移补偿效果好

有推广应用前景。

Abstract

The temperature compensate principles

structure and design of pulse image sensor formed on the silicon cantilever beam are discussed.Experiment results show that pulse image sensor temperature compensated has high sensitivity and high stability.Linear error is 1 %FS（0

N）

repeat error is 0.5 %FS and pressure sensitivity is about 50 mV/N.Temperature compensate transistor has good compensate effect to sensitivity drift of the pulse image sensor

the results apply equally to other fields.

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references

基于MEMS压力传感器的研究 [J]. 颜鹰,史铁林. 仪表技术与传感器 . 2005(02)

阵列式微机械悬臂梁的研制及其特性分析 [J]. 于晓梅,张大成,李婷,王小宝,阮勇,杜先锋. 半导体学报 . 2003(08)

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