Design of compound and intelligent sensor based on MEMS technology

QU Guo-fu; LIU Hong-zhao

doi:10.13873/j.1000-97872006.03.029

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Design of compound and intelligent sensor based on MEMS technology

更新时间：2025-09-11

- Design of compound and intelligent sensor based on MEMS technology
- Issue 3, Pages: 86-88(2006)
- 作者机构：
  
  1. 西安理工大学机仪学院
  2. 西安理工大学机仪学院,陕西,西安,710048
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.03.029
  CLC： TP212
- Published：2006
- 稿件说明：
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[1]曲国福,刘宏昭.基于MEMS技术的复合型智能传感器设计[J].传感器与微系统,2006(03):86-88.

QU Guo-fu, LIU Hong-zhao. Design of compound and intelligent sensor based on MEMS technology[J]. 2006, (3): 86-88.
[1]曲国福,刘宏昭.基于MEMS技术的复合型智能传感器设计[J].传感器与微系统,2006(03):86-88. DOI： 10.13873/j.1000-97872006.03.029.

QU Guo-fu, LIU Hong-zhao. Design of compound and intelligent sensor based on MEMS technology[J]. 2006, (3): 86-88. DOI： 10.13873/j.1000-97872006.03.029.

摘要

把微机电系统（MEMS）技术的加速度敏感元件和微处理器有机结合

借助智能算法

设计了一种多功能的复合传感器

可同时测量运动物体的的振动、冲击和倾斜角度。试验表明:该传感器能够足够同时精确地检测运动物体的振动、冲击和倾斜角度信息

用于汽车中时

能够及时检测汽车的动态信息与车体的姿态。

Abstract

Integrating acceleration sensing unit applying MEMS technique with micro control unit（MCU）

a multi-purpose compound sensor is designed with the help of intelligent algorithem

it can measure the vibration

shock and the tilt angle of mobile at the same time.Experiment results show the sensors can detect these informations of mobile in sufficient precision.As for the dynamic information and attitude of mobile can be immediately detected when it is used in automobiles.

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references

基于加速度计的数字式倾角仪的设计 [J]. 韩宏,吴嘉澍. 传感器技术 . 2005(04)

曲面过载保护的新型高g值冲击硅微机械加速度传感器的设计 [J]. 董健,李昕欣,王跃林,张鲲,宋朝晖. 机械强度 . 2003(02)

汽车MEMS传感器的应用及发展 [J]. 吴雄. 传感器世界 . 2002(03)

MEMS概况及发展趋势 [J]. 张威,张大成,王阳元. 微纳电子技术 . 2002(01)

微机械加工硅电容式加速度传感器 [J]. 李跃进,杨银堂,朱作云,马晓华,陈锦杜. 传感器技术 . 2001(01)

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