Nonlinear errors correcting method of piezoresistive pressure transducer

JIANG Xiao-yan~1; XU Da-cheng~1; YANG Cheng~2; XIE Wei-qin~2; WANG Wen-xiang~2

doi:10.13873/j.1000-97872006.01.027

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Nonlinear errors correcting method of piezoresistive pressure transducer

更新时间：2025-09-11

- Nonlinear errors correcting method of piezoresistive pressure transducer
- Issue 1, Pages: 76-78+84(2006)
- 作者机构：
  
  1. 苏州大学电子信息学院
  2. 昆山双桥传感器测控技术有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872006.01.027
  CLC： TP212.1
- Published：2006
- 稿件说明：
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[1]蒋小燕,徐大诚,杨成,谢维钦,王文襄.硅压阻式压力传感器非线性误差校正方法[J].传感器与微系统,2006(01):76-78+84.

JIANG Xiao-yan~1, XU Da-cheng~1, YANG Cheng~2, et al. Nonlinear errors correcting method of piezoresistive pressure transducer[J]. 2006, (1): 76-78+84.
[1]蒋小燕,徐大诚,杨成,谢维钦,王文襄.硅压阻式压力传感器非线性误差校正方法[J].传感器与微系统,2006(01):76-78+84. DOI： 10.13873/j.1000-97872006.01.027.

JIANG Xiao-yan~1, XU Da-cheng~1, YANG Cheng~2, et al. Nonlinear errors correcting method of piezoresistive pressure transducer[J]. 2006, (1): 76-78+84. DOI： 10.13873/j.1000-97872006.01.027.

摘要

利用ZMD31020传感器信号处理器

实现了硅压阻式传感器的非线性及温度补偿。通过软件输入预先设定的数字量给ZMD31020处理器的存贮空间

可实现硅压阻式压力传感器（PRT）的零点输出、热零点漂移、满量程输出、热灵敏度漂移和非线性的高精度校准和补偿。传感器的输出精度达到了0.275%。

Abstract

The ZMD31020 is a special sensor signal processor optimized for piezoresistive sensor nonlinearity and temperature compensation.The preestablished digital quantities are inputted to ZMD31020 locations by software.The zero point output

thermal zero shift

full-scale output

thermal sensitivity shift and nonlinearity of piezoresistive pressure transducer（PRT） are compensated and calibrated precisely.The sensor output error is achieved to（0.275 %） by error analysis.

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references

压阻式压力传感器输出特性的补偿 [J]. 李永科,田庆民,董海瑞. 传感器技术 . 2004(06)

集成化智能传感器原理与应用[M]. 电子工业出版社 , 沙占友主编, 2004

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