Application of eddy current sensor in measuring thickness of aluminum

LI Yu-jun; LIU Jun; ZHOU Jun-wei; ZHANG Li-chun

doi:10.13873/j.1000-97872005.06.029

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Application of eddy current sensor in measuring thickness of aluminum

更新时间：2025-09-11

- Application of eddy current sensor in measuring thickness of aluminum
- Issue 6, Pages: 77-78+84(2005)
- 作者机构：
  
  1. 西安理工大学自动化与信息工程学院
  2. 西安理工大学自动化与信息工程学院,陕西,西安,710048
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872005.06.029
  CLC： TP274.4
- Published：2005
- 稿件说明：
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[1]李玉军,刘军,周军伟,张黎春.电涡流传感器在铝箔厚度测量中的应用[J].传感器技术,2005(06):77-78+84.

LI Yu-jun, LIU Jun, ZHOU Jun-wei, et al. Application of eddy current sensor in measuring thickness of aluminum[J]. 2005, (6): 77-78+84.
[1]李玉军,刘军,周军伟,张黎春.电涡流传感器在铝箔厚度测量中的应用[J].传感器技术,2005(06):77-78+84. DOI： 10.13873/j.1000-97872005.06.029.

LI Yu-jun, LIU Jun, ZHOU Jun-wei, et al. Application of eddy current sensor in measuring thickness of aluminum[J]. 2005, (6): 77-78+84. DOI： 10.13873/j.1000-97872005.06.029.

摘要

采用双频激励的低频透射式电涡流传感器在线测量铝箔厚度

同时

检测了铝箔表面温度

从而实现了多参数检测。为了减小传感器的非线性误差

消除铝箔厚度及其表面温度间的交叉敏感对其厚度检测所带来的影响

采用免疫算法实现多参数数据拟合。实测结果表明这种数据拟合消除了铝箔表面温度对铝箔厚度测量的影响

提高了检测精度

测量范围达到1～100μm

分辨力达到0.01μm。

Abstract

Transmissive eddy current sensor inspired by two sine signals with different frequencies is used to measure the thickness of aluminum foil and the temperature of the surface of aluminum foil on line.And multi-parameter measurement is realized.In order to reduce the no-linear error and cross-sensitivity

immunity algorithm is used to fulfill multi-parameter data fitting.Measurement results show that this kind of data fitting method eliminates the effect of the temperature of the surface of aluminum foil on the measurement of the thickness of aluminum foil

and the measurement precision is increased.The measuring range can reach 1

00μm

the resolution 0.01μm.

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Keywords

references

免疫算法综述 [J]. 葛红. 华南师范大学学报(自然科学版) . 2002(03)

人工神经元网络原理与应用[M]. 东北大学出版社 , 王旭等编著, 2000

传感器的理论与设计基础及其应用[M]. 国防工业出版社 , 单成祥编著, 1999

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