Temperature-resistant polysilicon strain gauge

SUN Feng-ling; TIAN Lei; SUN Xue-zhi; WANG Shan-ci

doi:10.13873/j.1000-97872001.03.008

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Temperature-resistant polysilicon strain gauge

更新时间：2025-09-11

- Temperature-resistant polysilicon strain gauge
- Issue 3, Pages: 21-23(2001)
- 作者机构：
  
  信息产业部电子第四十九研究所,黑龙江,哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97872001.03.008
  CLC： TH823.3
- Published：2001
- 稿件说明：
移动端阅览
[1]孙凤玲,田雷,孙学智,王善慈.耐高温多晶硅应变计[J].传感器技术,2001(03):21-23.

SUN Feng-ling, TIAN Lei, SUN Xue-zhi, et al. Temperature-resistant polysilicon strain gauge[J]. 2001, (3): 21-23.
[1]孙凤玲,田雷,孙学智,王善慈.耐高温多晶硅应变计[J].传感器技术,2001(03):21-23. DOI： 10.13873/j.1000-97872001.03.008.

SUN Feng-ling, TIAN Lei, SUN Xue-zhi, et al. Temperature-resistant polysilicon strain gauge[J]. 2001, (3): 21-23. DOI： 10.13873/j.1000-97872001.03.008.

摘要

介绍了一种适用于特殊环境进行高温测量的多晶硅应变计的原理、设计、制作工艺及粘贴方法。它的特点是耐高温（可用在温度达 2 5 0℃的环境中）、体积小、安装方便。该种应变计已用于检测电站锅炉焊缝的牢固程度

在实际应用中性能较好

Abstract

Polysilicon strain gauge being applied to special environment is introduced

including principle

design

manufacture technology and bonding method.It features in resistance to high temperature up to 250?℃

small volume and expedient installation.The strain gauge has been used to inspect slot weld of boiler in power station

the performance is better in practical application.

关键词

Keywords

references

多晶硅敏感技术(连载五) [J]. 王善慈. 传感器技术 . 1994(05)

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