ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method

Qi Zhimei Zhang Yaohua Li Minqiang Tang Honglin

doi:10.13873/j.1000-97871994.04.004

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ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method

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- ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method
- Issue 4, Pages: 18-21(1994)
- 作者机构：
  
  中科院合肥智能机械研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-97871994.04.004
  CLC： TN304
- Published：1994
- 稿件说明：
移动端阅览
[1]祁志美,张耀华,李民强,唐红霖.浸渍涂布法制备ITO气敏薄膜[J].传感器技术,1994(04):18-21.

Qi Zhimei Zhang Yaohua Li Minqiang Tang Honglin. ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method[J]. 1994, (4): 18-21.
[1]祁志美,张耀华,李民强,唐红霖.浸渍涂布法制备ITO气敏薄膜[J].传感器技术,1994(04):18-21. DOI： 10.13873/j.1000-97871994.04.004.

Qi Zhimei Zhang Yaohua Li Minqiang Tang Honglin. ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method[J]. 1994, (4): 18-21. DOI： 10.13873/j.1000-97871994.04.004.

摘要

利用含In

Sn成分的水溶液

经浸渍涂布工艺在不同衬底上制备了ITO薄膜（掺Sn的In

薄膜）。采用XRD、XPS、SEM分析了薄膜的结构

成分和表面形貌;测试薄膜的气敏特性

发现其对NO

有良好的选择性和灵敏度

而且薄膜显示出长时间良好的工作稳定性

可望制成实用的NO

敏感元件。

Abstract

ITO thin films were prepared by a dip - coating method using a aqueous solution containing In and Sn elements. Structure

composition and surface morphology of the thin films were examined by XRD

XPS and SEM respectively. The gas sensitive properties of the thin films were investigated and the results indicated that the thin films had a good selectivity and a high sensitivity to NO

and their resistances were very steady.

关键词

Keywords

references

薄膜型SnO 2 气敏元件初探 [J]. 沈瑜生,张云昌. 半导体学报 . 1984(03)

A new technique for growing porous SnO 2 （Bi 2 O 3 ） thin films as hydrogen gas sensors [J] . G. Sberveglieri,S. Groppelli,P. Nelli,A. Camanzi. Journal of Materials Science Letters . 1991 (10)

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