Differential capacitance detection method based on capacitance bridge

CHEN Bingxian; SONG Lailiang; ZHANG Chunxi

doi:10.13873/j.1000-9787(2019)12-0116-04

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Differential capacitance detection method based on capacitance bridge

更新时间：2025-09-11

- Differential capacitance detection method based on capacitance bridge
- Issue 12, Pages: 116-119(2019)
- 作者机构：
  
  北京航空航天大学仪器科学与光电工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2019)12-0116-04
  CLC： TM934.2
- Published：2019
- 稿件说明：
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CHEN Bingxian, SONG Lailiang, ZHANG Chunxi. Differential capacitance detection method based on capacitance bridge[J]. 2019, (12): 116-119.
DOI：

CHEN Bingxian, SONG Lailiang, ZHANG Chunxi. Differential capacitance detection method based on capacitance bridge[J]. 2019, (12): 116-119. DOI： 10.13873/j.1000-9787(2019)12-0116-04.

摘要

数字闭环石英挠性加速度计系统主要由石英挠性加速度计表头和数字检测电路组成

其极限精度取决于差动电容检测电路的灵敏度。针对数字闭环石英挠性加速度计前端差动电容检测的需求

给出了一种基于电容桥的差动电容检测方法。利用数字电路产生高频方波进行单载波调制

同时利用交流电容桥结构对载波信号进行处理

并设计后续的差分放大电路对载波信号进一步处理最终实现对微弱差动电容变化的检测。经过实验验证

检测电路对电容的检测最终实现最小分辨率约为1. 8 f F(对应加速度变化1μgn)。

Abstract

The digital closed-loop quartz flex accelerometer system is mainly composed of a quartz flex accelerometer header and a digital detection circuit. Its limit precision depends on the sensitivity of the differential capacitance detection circuit. In order to meet the demand for differential capacitance detection in front end of digital closed-loop quartz flex accelerometer

a differential capacitance detection method based on capacitance bridge is presented. Using digital circuit to generate high frequency square wave for single carrier modulation. At the same time

the AC capacitor bridge structure is used to process the carrier signal. The following differential amplifier circuit is designed and the carrier signal is further processed. Finally

the change of weak differential capacitance is detected. The experimental verification shows that the minimum resolution of capacitance detection by the detection circuit is about 1. 8 f F at last

corresponding to acceleration change of 1 μgn.

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