According to the piezoelectric effect and anisotropy of quartz crystal

the stress distribution characteristics of the points in the AT-cut quartz crystal thin wafer under radial force are obtained by finite element simulation analysis based on Comsol Multiphysics software.An integrated six-electrode quartz resonator on the same wafer is designed and fabricated based on the stress distribution characteristics.Based on the resonator design

the initial structure of the horizontal attitude sensor is constructed.According to the principle of common mode rejection

temperature and interference of other related factors are suppressed by the difference frequency processing.At room temperature

place the initial sample on the tilting table and connect to the resonant circuit

rotate the tilting table and measure the resonant frequency of prototype sample at different tilt angles.The experimental results show that variation of the resonant frequency is stable between-90°and 90°

and the input-output relationship is linear.It can be used for attitude detection of sensitive element.