Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor

GONG Zhongliang; LIU Hanshuang

doi:10.13873/j.1000-9787(2019)07-0043-03

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Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor

更新时间：2025-09-11

- Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor
- Issue 7, Pages: 43-45(2019)
- 作者机构：
  
  中南林业科技大学机电工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2019)07-0043-03
  CLC： TP212
- Published：2019
- 稿件说明：
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GONG Zhongliang, LIU Hanshuang. Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor[J]. 2019, (7): 43-45.
DOI：

GONG Zhongliang, LIU Hanshuang. Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor[J]. 2019, (7): 43-45. DOI： 10.13873/j.1000-9787(2019)07-0043-03.

摘要

为了提高倾角传感器测量精度

提出了一种基于最小二乘多项式分段函数非线性曲线拟合温度漂移补偿方法。根据倾角传感器原理与温度漂移补偿特性

结合实验情况

建立两段分段函数温度漂移补偿模型

忽略其它粗大误差的影响

引入自变量温度

并固定角度

使用最小二乘法对实验采集的数据进行分析与处理。经实验证明:温度在-36～55℃范围内倾角传感器测量误差精度达到0. 001°。该方法有效地提高了倾角传感器的测量精度

取得了良好的补偿效果。

Abstract

In order to improve the measurement precision of the tilt angle sensor

a temperature drift compensation method based on the least square polynomial piecewise function nonlinear curve fitting is proposed. According to the principle of tilt angle sensor and the characteristic of temperature drift compensation

a two-segment function temperature drift compensation model is established

which ignores the influence of other gross errors

and introduces independent variable temperature and fixed angle. The least square method is used to analyze and process the data collected from the experiment. The experimental results show that the measuring error of the tilt angle sensor reaches 0. 001° in the temperature range of-36 ～ 55 ℃. This method can effectively improve the measuring precision of the inclination sensor and obtain a good compensation effect.

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