Design of small-size capacitive inclination measuring instrument system

ZHANG Hao; WANG Hong-wei; HAO Shao-hua; CHEN Pei-min

doi:10.13873/j.1000-9787(2018)11-0090-02

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Design of small-size capacitive inclination measuring instrument system

更新时间：2025-09-11

- Design of small-size capacitive inclination measuring instrument system
- Vol. 37, Issue 11, Pages: 90-91+95(2018)
- 作者机构：
  
  北京信息科技大学理学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)11-0090-02
  CLC： TH712;TP212
- Published：2018
- 稿件说明：
移动端阅览
[1]张浩,王宏伟,郝少华,陈培敏.小型电容式倾角测量仪系统设计[J].传感器与微系统,2018,37(11):90-91+95.

ZHANG Hao, WANG Hong-wei, HAO Shao-hua, et al. Design of small-size capacitive inclination measuring instrument system[J]. 2018, 37(11): 90-91+95.
[1]张浩,王宏伟,郝少华,陈培敏.小型电容式倾角测量仪系统设计[J].传感器与微系统,2018,37(11):90-91+95. DOI： 10.13873/j.1000-9787(2018)11-0090-02.

ZHANG Hao, WANG Hong-wei, HAO Shao-hua, et al. Design of small-size capacitive inclination measuring instrument system[J]. 2018, 37(11): 90-91+95. DOI： 10.13873/j.1000-9787(2018)11-0090-02.

摘要

基于弹性优良的铍青铜材料制作了一种具有双梁三明治式电容倾角传感器

并采用专用电容检测芯片MS3110将倾角传感器的差分电容信号转换为电压信号

同时通过微控制器STM32的控制芯片检测参数实现对传感器非线性的补偿

使倾角测量仪系统具有良好的线性度;通过模数转换器（ADC）采集和转换将数据显示在屏幕上。实验证明:设计的电容式倾角测量仪系统具有测量范围广、稳定性高、线性度好的特点。

Abstract

A double-beam sandwich capacitor tilt sensor is produced based on excellent elastic beryllium bronze material.On this basis

a dedicated capacitance detection chip MS3110 converts differential capacitance signal of tilt sensor to voltage signal

and adjusts its parameters by the control of the microcontroller STM32 for nonlinearity compensation of sensor

so as to malce inclination measurement instrument system has good linearity.Data is displayed on screen by ADC acquisition and conversion. Experiments show that the capacitive inclination measuring instrument system has the characteristics of wide measuring range

high stability and good linearity.

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references

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铍青铜倾角传感器及其线性度补偿 [J]. 王宏伟. 传感器与微系统 . 2015(08)

新型倾角传感器设计 [J]. 张延豫,时振彬,李士光,陈明文. 科技创新导报 . 2013(22)

一种电容式微加速度计偏置电压和标度因数自动标定方法 [J]. 耿赛柳,徐大诚,郭述文. 传感器与微系统 . 2013(07)

基于MS3110电容读取芯片的MEMS加速度计 [J]. 刘民杰,刘云峰,董景新,赵常德. 中国惯性技术学报 . 2010(02)

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