Research progress of optical resonant cavity type humidity sensor

ZHANG Meng; ZHAO Xue-feng; YUN Li-yu; WEN Feng; ZHANG Yan-jun; YAN Shu-bin

doi:10.13873/j.1000-9787(2018)11-0001-05

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Research progress of optical resonant cavity type humidity sensor

更新时间：2025-09-11

- Research progress of optical resonant cavity type humidity sensor
- Vol. 37, Issue 11, Pages: 1-5+17(2018)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 中国人民武装警察部队指挥学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)11-0001-05
  CLC： TP212
- Published：2018
- 稿件说明：
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[1]张勐,赵学峰,韵力宇,文丰,张彦军,闫树斌.光学谐振腔式湿度传感器的研究进展[J].传感器与微系统,2018,37(11):1-5+17.

ZHANG Meng, ZHAO Xue-feng, YUN Li-yu, et al. Research progress of optical resonant cavity type humidity sensor[J]. 2018, 37(11): 1-5+17.
[1]张勐,赵学峰,韵力宇,文丰,张彦军,闫树斌.光学谐振腔式湿度传感器的研究进展[J].传感器与微系统,2018,37(11):1-5+17. DOI： 10.13873/j.1000-9787(2018)11-0001-05.

ZHANG Meng, ZHAO Xue-feng, YUN Li-yu, et al. Research progress of optical resonant cavity type humidity sensor[J]. 2018, 37(11): 1-5+17. DOI： 10.13873/j.1000-9787(2018)11-0001-05.

摘要

对当前光学谐振腔式湿度传感器领域的最新研究进展进行了综述

比较了基于微环、微结和回音壁式谐振腔的湿度传感器的光学品质因数Q、灵敏度等关键特性

并对此类湿度传感器的未来发展趋势进行了展望。

Abstract

The latest research progress of the field of optical resonator type humidity sensor is reviewed

optical quality factor Q

sensitivity and other key characteristics of humidity sensors based on microloop

microknot and whispering gallery type resonator of humidity sensor are compared and the future development trend of the humidity sensor is prospected.

关键词

Keywords

references

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