Temperature compensation system of MEMS accelerometer based on BPNN optimized by MEA

PANG Zuo-chao; XU Da-cheng; GUO Shu-wen

doi:10.13873/j.1000-9787(2018)08-0097-03

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Temperature compensation system of MEMS accelerometer based on BPNN optimized by MEA

更新时间：2025-09-11

- Temperature compensation system of MEMS accelerometer based on BPNN optimized by MEA
- Issue 8, Pages: 97-99+103(2018)
- 作者机构：
  
  苏州大学微纳传感技术研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)08-0097-03
  CLC： TH824.4
- Published：2018
- 稿件说明：
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PANG Zuo-chao, XU Da-cheng, GUO Shu-wen. Temperature compensation system of MEMS accelerometer based on BPNN optimized by MEA[J]. 2018, (8): 97-99+103.
DOI：

PANG Zuo-chao, XU Da-cheng, GUO Shu-wen. Temperature compensation system of MEMS accelerometer based on BPNN optimized by MEA[J]. 2018, (8): 97-99+103. DOI： 10.13873/j.1000-9787(2018)08-0097-03.

摘要

在充分研究单轴硅微扭摆式电容加速度计结构原理和温度特性的基础上

利用思维进化算法(MEA)优化反向传播神经网络(BPNN)参数构建微机电系统(MEMS)加速度计的温度补偿模型

通过温度实验

计算出温度模型参数

进而实现实时温度补偿。实验结果表明:使用MEA优化的BPNN算法补偿后加速度计的非线性由1 576×10-6减小为266×10-6

标度因数温度系数由438×10-6/℃减小为78×10-6/℃

全温零偏极差由58.8 mgn减小为2.7 mgn

加速度计的温度特性大幅提高

证明所提温度补偿算法的有效性。

Abstract

On the basis of full study on the structure principle and temperature characteristics of silicon torsion pendulum capacitive accelerometer

temperature compensation model for micro-electro-mechanical system（ MEMS）accelerometer is constructed by back propagation neural network（ BPNN） optimized by mind evolutionary algorithm（ MEA）. Temperature compensation is realized in real-time. By temperature experiment

calculate temperature model parameters optimized

realize temperature compensation in realtime. Experimental results show that the temperature coefficient of scale factor

the full temperature zero bias range and the nonlinear are decreased from 438 × 10-6/℃

58. 8 mgnand 1 576 × 10-6 to 78 × 10-6℃

2. 7 mgnand 266 × 10-6 respectively after compensating with the temperature model. The experiment improves the temperature characteristics of the accelerometer greatly and proves the effectiveness of temperature compensation method.

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