Analysis on mechanical properties of corrugated diaphragm for pressure sensor

LIU Ya-wei; HU Meng-fei; YANG Lu-lu; HU Guo-jun; L Pin

doi:10.13873/j.1000-9787(2018)08-0040-03

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Analysis on mechanical properties of corrugated diaphragm for pressure sensor

更新时间：2025-09-11

- Analysis on mechanical properties of corrugated diaphragm for pressure sensor
- Issue 8, Pages: 40-42(2018)
- 作者机构：
  
  1. 合肥工业大学工业与装备技术研究院
  2. 中国电子科技集团公司第三十八研究所微电子封装研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)08-0040-03
  CLC： TP212
- Published：2018
- 稿件说明：
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LIU Ya-wei, HU Meng-fei, YANG Lu-lu, et al. Analysis on mechanical properties of corrugated diaphragm for pressure sensor[J]. 2018, (8): 40-42.
DOI：

LIU Ya-wei, HU Meng-fei, YANG Lu-lu, et al. Analysis on mechanical properties of corrugated diaphragm for pressure sensor[J]. 2018, (8): 40-42. DOI： 10.13873/j.1000-9787(2018)08-0040-03.

摘要

利用ANSYS有限元软件

对压力传感器波纹膜片的有关结构参数与力学性能的关系进行了分析:对均布载荷和集中载荷作用下

波纹膜片中心位移的有限元解与解析解进行了比较

验证有限元模型和结果的精度;根据ANSYS分析结果

对不同型面结构的波纹膜片

比较波纹形状对膜片力学性能的影响;讨论了正弦型波纹膜片的膜片厚度、波纹高度、波纹数目对其性能的影响

为波纹膜片结构的优化设计提供依据。

Abstract

The corrugated diaphragm of pressure sensors which has isolated packaging structure

relationship between structural parameters and mechanical properties of the corrugated diaphragm are analyzed with ANSYS finite element software. Finite element numerical solutions and analytical solution are compared

results precsion and finite element model are verified. With ANSYS analysis results

effects of the diaphragm structures with different corrugated shapes on mechanical properties is compared. Aiming at sinusoidal corrugated diaphragm

effect of diaghragm thickness

wave height and ripple number on characteristics are studied in detail which can provide basis for the optimum design of corrugated diaphragm structure.

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