The structure of C type elastic diaphragm joint of silicon-sapphire silicon pressure sensor and the structure of E type elastic diaphragm joint are modeled and analyzed

optimized design of stress isolating groove structure is applied to the structure of elastic diaphragm and joint of silicon-sapphire pressure sensor by integrated design. It solves the problem that zero-point output of silicon-sapphire pressure sensor and output of full range occur offset under asymmetrical installation stress

which affects measurement precision of sensor. Safety and reliability of sensor are further improved

and it has wide applications in the field of aerospace.