Aiming at requirements of high precision

small volume

multi-degree-of-freedom（ DOF） moving motor for optoelectronic packaging equipment

a kind of micro single stator linear rotating two-DOF voice coil motor is designed. Structure characteristic and operation principle of the motor is introduced

with the optimization goal of output thrust and torque characteristics of two DOF voice coil motor

structural parameters are optimized by finite element simulation. Manufacture prototype for experiment

according to the optimized structure parameters.Experimental results show that the motor has large output force and torque amplitude

force and torque fluctuation are less than 0. 5 %

effectiveness of the motor design and optimization simulation is verified.