On the basis of remaining overall size unchanged

combining with lumped parameter model

ANSYS finite element software is used for optimization desian of structural pararneter

the optimal size of piezoelectric cantilever beam element is 5 mm × 12 mm × 0. 05 mm. Technological process is designed and the principle prototype is fabricated successfully according to the optimal size. Test result shows that with an optimized load of80 kΩ

the prototype possesses maximum output power of 66. 125 μW and output voltage of 2. 3 V at 1 gn acceleration

excited by resonant frequency of 204. 6 Hz

which meets requirement of energy supply of partial low power consumption sensing nodes.