A piezoresistive micro pressure sensor is designed

based on piezoresistive effect and Wheatstone Bridge Principle. Snake shape pressure sensitive resistor is designed to increase sensitivity. A design scheme is proposed

which considers sensitive thin-film design of micro pressure chip

confirmation of sensitive resistor strip and position selection of sensitive resistor

and process certification is carried out. The verification result shows that the sensitivity of the designed micro micro pressure chip can reach 24 mV/kPa

nonlinearity is prior to 0. 2 % FS.