Research progress on application of SAW sensors in high temperature field

PAN Xiao-shan; YANG Lu-yu; WANG Qin; LI Gong-yan

doi:10.13873/j.1000-9787(2018)06-0001-04

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Research progress on application of SAW sensors in high temperature field

更新时间：2025-09-11

- Research progress on application of SAW sensors in high temperature field
- Issue 6, Pages: 1-4+7(2018)
- 作者机构：
  
  1. 中国科学院微电子研究所
  2. 国网辽宁省电力公司电力科学研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)06-0001-04
  CLC： TP212.9
- Published：2018
- 稿件说明：
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PAN Xiao-shan, YANG Lu-yu, WANG Qin, et al. Research progress on application of SAW sensors in high temperature field[J]. 2018, (6): 1-4+7.
DOI：

PAN Xiao-shan, YANG Lu-yu, WANG Qin, et al. Research progress on application of SAW sensors in high temperature field[J]. 2018, (6): 1-4+7. DOI： 10.13873/j.1000-9787(2018)06-0001-04.

摘要

相比于其他类型的无线传感器

无线声表面波传感器能解决恶劣环境(如高温)下的探测问题。基于目前的声表面波传感器

阐述了声表面波技术的发展、工作模式和原理;结合当前声表面波在高温领域应用的研究状况

详细阐述了声表面波传感器在高温应用领域需要解决的问题以及适用于高温领域的声表面波传感器的材料;对声表面波传感器在高温领域中的应用和发展进行了总结和展望。

Abstract

Surface acoustic wave（ SAW） sensors can work under harsh environment

such as high temperature compared with other types of sensors. Based on current developed SAW sensors

the development

operation mode and principle of SAW technology are reviewed in details. Combined with recent researches and material property concerning the field of high temperature applications is also discussed. Outlook of this field is briefly summarized and prospected.

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