High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes

SUN Zhen-yuan; LI Guang-lei; CHEN Lian-hong; CHEN Jian; CHEN De-yong; WANG Jun-bo

doi:10.13873/j.1000-9787(2018)05-0010-03

Chinese

您当前的位置：

首页 >

文章列表页 >

High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes

更新时间：2025-09-11

- High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes
- Issue 5, Pages: 10-12(2018)
- 作者机构：
  
  1. 中国科学院电子学研究所传感技术国家重点实验室
  2. 中国科学院大学
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)05-0010-03
  CLC： TP212;P315.62
- Published：2018
- 稿件说明：
移动端阅览
SUN Zhen-yuan, LI Guang-lei, CHEN Lian-hong, et al. High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes[J]. 2018, (5): 10-12.
DOI：

SUN Zhen-yuan, LI Guang-lei, CHEN Lian-hong, et al. High sensitivity MEMS electrochemical seismic sensor based on flexible microelectrodes[J]. 2018, (5): 10-12. DOI： 10.13873/j.1000-9787(2018)05-0010-03.

摘要

为了进一步降低微机电系统(MEMS)电化学地震检波器敏感电极的加工成本

提升传感器的灵敏度

推动其在地球物理勘探等领域的发展

提出了一种基于柔性微电极结构的新型MEMS电化学地震检波器。与基于硅衬底制作敏感电极相比

敏感电极的制作方法可以通过有效减小电极间距

大幅度提升传感器的灵敏度

大幅降低工艺成本。介绍了柔性微电极的加工工艺流程

并对传感器的性能进行了测试。结果表明:提出的地震检波器较基于硅衬底微电极器件灵敏度提高了一个数量级。

Abstract

In order to further decrease cost of sensing electrodes of electrochemical seismometer

and increase its sensitivity

promoting its development in the field of geophysical exploration

a MEMS-based electrochemical seismic sensor based on flexible microelectrodes is presented.Compared with silicon-based fabrication process

the proposed fabrication process of the microelectrodes can effectively decrease the cost and reduce intervals between the electrodes

leading to a significantly increase in the sensitivity of the device.Fabrication process of the proposed flexible microelectrodes is introduced and the performance of the proposed device is test. Test result demonstrates that the sensitivity is one order higher than that of silicon-based counterpart.

关键词

Keywords

references

Views

208

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Study on high-sensitivity buried FBG strain sensors

Research on self-oscillating fluxgate current sensor based on dual-core detection technology

Research on simulation and optimization of micro-hot plate structure based on MEMS

Research on transmitting performance of capacitive micromachined ultrasound transducer

Study on 2D electrostatic-driven micro scanning mirror applied to LiDAR

Related Author

LUO Wei

YANG Xi

ZHI Wanrong

LIU Ya

ZHANG Zhenyu

XIN Mingyong

TAN Zejie

XU Changbao

Related Institution

2.Pu’er Transportation Construction Testing Co Ltd,Pu’er

Yunnan Aerospace Engineering Geophysical Detecting Co Ltd

Kaili Power Supply Bureau of Guizhou Power Grid Co Ltd,Kaili

Southern Power Grid Digital Grid Research Institute Co Ltd

Electric Power Research Institute of Guizhou Power Grid Co Ltd

⁰