Combining pressure sensitive properties of polysilicon by depositting

polysilicon pressure sensitive resistance on Si diaphragm and precise micro packaging technology

micro silicon piezoresistive soil pressure and pore water pressure sensors is designed. The resistance change of the polysilicon diaphragm under pressure is transformed to electric signal output. Through calibration experiments

it is shown that the zero point output of the sensor is small

dynamic frequency response and linear fitting degree are high

which is suitable for high precision practical engineering and dimensional limit of indoor model test.