Micro-nano displacement measurement system based on optical lever

ZHANG Chong; MA Shu-jun; LI Lu-lu; XIU Qiang

doi:10.13873/j.1000-9787(2017)11-0103-03

Chinese

您当前的位置：

首页 >

文章列表页 >

Micro-nano displacement measurement system based on optical lever

更新时间：2025-09-11

- Micro-nano displacement measurement system based on optical lever
- Vol. 36, Issue 11, Pages: 103-105+108(2017)
- 作者机构：
  
  东北大学机械工程与自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2017)11-0103-03
  CLC： TH822
- Published：2017
- 稿件说明：
移动端阅览
[1]张冲,马树军,李鲁鲁,修强.基于光学杠杆法的微纳位移测量系统[J].传感器与微系统,2017,36(11):103-105+108.

ZHANG Chong, MA Shu-jun, LI Lu-lu, et al. Micro-nano displacement measurement system based on optical lever[J]. 2017, 36(11): 103-105+108.
[1]张冲,马树军,李鲁鲁,修强.基于光学杠杆法的微纳位移测量系统[J].传感器与微系统,2017,36(11):103-105+108. DOI： 10.13873/j.1000-9787(2017)11-0103-03.

ZHANG Chong, MA Shu-jun, LI Lu-lu, et al. Micro-nano displacement measurement system based on optical lever[J]. 2017, 36(11): 103-105+108. DOI： 10.13873/j.1000-9787(2017)11-0103-03.

摘要

采用自行设计搭建的光学杠杆光路系统

使用位置敏感度探测元件（PSD）对悬臂梁的微小挠度变化进行测量。介绍了实验原理及系统搭建。实验测量与分析表明:系统分辨力可达0.06μm。对自制的悬臂梁挠度变形进行测量

并与微动平台的实际位移量对比

结果基本一致

验证了系统的可靠性。

Abstract

Using self-designed optical lever light path system and position sensitive detector（ PSD） to measure small deflection of cantilever. Experimental principle and system building are introduced. Experimental measurement and data analysis are implemented. The resolution of measurement system can reach 0.06 μm. Using this system to measure small deflection of homemade cantilever. Through comparing with the actual displacement of micro-positioning platform

the results are basically identical. It verifies reliability of the system.

关键词

Keywords

references

AFM微悬臂梁探针弹性常数各种标定方法的比较与分析 [J]. 宋云鹏,吴森,傅星,徐临燕. 传感技术学报 . 2015(08)

应力型微悬臂梁生化传感器响应机理研究进展 [J]. 杨天天. 传感器与微系统 . 2014(06)

基于显微光杠杆技术的微结构偏转角测量系统 [J]. 刘璐,李艳宁,吴森,胡晓东. 光学技术 . 2014(03)

一种压阻式微悬臂梁免疫传感器及其动力学分析 [J]. 刘志伟,童朝阳,穆晞惠,刘冰,郝兰群,张金平. 传感器与微系统 . 2014(03)

基于弯曲法的AFM微悬臂梁弹性常数标定技术 [J]. 吴森,陈庆超,张超,傅星,胡晓东,胡小唐. 仪器仪表学报 . 2012(11)

微悬臂梁横向弹性系数标定技术 [J]. 包汉瑜,吴森,吴瑶瑶. 传感器与微系统 . 2012(08)

微悬臂梁传感器在环境检测中的应用 [J]. 滕艳华,薛长国. 传感器与微系统 . 2011(04)

基于光学读出的微悬臂梁生化传感技术研究 [D]. 黄渊. 中国科学技术大学 2009

用于气体测量的压电微悬臂梁力学建模与实验研究 [D]. 景大雷. 哈尔滨工业大学 2011

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems [J] . R.W. Herfst,W.A. Klop,M. Eschen,T.C. van den Dool,N.B. Koster,H. Sadeghian. Measurement . 2014

Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy [J] . Javier Tamayo,Valerio Pini,Prisicila Kosaka,Nicolas F Martinez,Oscar Ahumada,Montserrat Calleja. Nanotechnology . 2012 (31)

A complete analysis of the laser beam deflection systems used in cantilever-based systems [J] . L.Y. Beaulieu,Michel Godin,Olivier Laroche,Vincent Tabard-Cossa,Peter Grütter. Ultramicroscopy . 2006 (4)

Views

175

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Cantilever beam deflection correction method for coating layer thickness measurement

FBG flow velocity sensor based on cantilever with variable width

Finite element analysis of thermal structure composite film based on ABAQUS

Optimization method of frequency characteristics of cantilever vortex flow sensor

A novel high sensitivity and shock resistance integrated optical accelerometer

Related Author

WANG Zhao-ba

JIN Yong

ZHANG Shuai

WU Ting-wei

BAI Guang-fu

TIAN Jing

JIANG Yang

HUANG Feng-qin

Related Institution

School of Information and Communication Engineering,North University of China

Institute of Technology Physics,Guizhou University

School of Mechanical Engineering, Jiangsu University

Ningbo Dongchi Measuring Technology,Co Ltd

College of Biomedical Engineering & Instrument Science,Zhejiang University

⁰