Research on mechanical properties of thin films based on bulge test

LI Lu-lu; MA Shu-jun; ZHANG Chong; XIU Qiang

doi:10.13873/j.1000-9787(2017)09-0008-05

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Research on mechanical properties of thin films based on bulge test

更新时间：2025-09-11

- Research on mechanical properties of thin films based on bulge test
- Vol. 36, Issue 9, Pages: 8-12(2017)
- 作者机构：
  
  东北大学机械工程与自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2017)09-0008-05
  CLC： O484.2
- Published：2017
- 稿件说明：
移动端阅览
[1]李鲁鲁,马树军,张冲,修强.基于鼓膜法的薄膜力学性能测试研究[J].传感器与微系统,2017,36(09):8-12.

LI Lu-lu, MA Shu-jun, ZHANG Chong, et al. Research on mechanical properties of thin films based on bulge test[J]. 2017, 36(9): 8-12.
[1]李鲁鲁,马树军,张冲,修强.基于鼓膜法的薄膜力学性能测试研究[J].传感器与微系统,2017,36(09):8-12. DOI： 10.13873/j.1000-9787(2017)09-0008-05.

LI Lu-lu, MA Shu-jun, ZHANG Chong, et al. Research on mechanical properties of thin films based on bulge test[J]. 2017, 36(9): 8-12. DOI： 10.13873/j.1000-9787(2017)09-0008-05.

摘要

采用自行研制的鼓膜实验装置

结合迈克尔逊激光干涉位移测量技术

获取薄膜的变形值与压力值之间的关系曲线

以实现薄膜试样力学性能的测试。对鼓膜法测试薄膜力学性能的现状做了评述;对实验原理以及装置设计进行论述;进行实验测量

并对实验结果进行有限元分析与仿真。对纯铝薄膜（纯度99.9%

厚为210μm）进行鼓膜实验

测得其弹性模量E为68.3 GPa

与资料结果基本一致

说明研制的鼓膜实验装置测量薄膜力学性能方法切实可行。实验装置对于在微/纳机电系统（MEMS/NEMS）中广泛应用的薄膜材料的力学性能表征具有十分重要的意义。

Abstract

To determine the mechanical properties of thin films by obtaining the relation curve of continuous bugling deformation and corresponding load

bulge test experiment equipment in conjunction with Michelson interferometry displacement measuring system is made. Firstly

the current status of bulge test methods for measuring mechanical properties of thin films is reviewed. Then the principle of the testing method

the design of blister experiment in the test is introduced. Lastly

finite element method is used to simulate the bulge test of the samples. In order to validate the method

Al thin films（ purity is 99. 9 %; thickness is 210 μm） are tested by the developed method. The elastic modulus E of the Al film is measured to be 68. 3 GPa

which is in an agreement with the given material reference values. It can thus be concluded that it is feasible to measure mechanical properties of thin films by our devised bulge testing setup. It is vitally significant for the application of our developed experiment setup to characterize thin films widely used in the field of the micro/nano-electro-mechanical system（ MEMS/NEMS）.

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