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Algorithm for electrostatic tuning of disk resonator MEMS vibration gyroscope
更新时间:2025-09-11
    • Algorithm for electrostatic tuning of disk resonator MEMS vibration gyroscope

    • Vol. 36, Issue 7, Pages: 134-137+145(2017)
    • DOI:10.13873/j.1000-9787(2017)07-0134-04    

      CLC: TH-39
    • Published:2017

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  • YU De-chuan, HE Han-hui, ZHOU Xin, et al. Algorithm for electrostatic tuning of disk resonator MEMS vibration gyroscope[J]. 2017, 36(7): 134-137+145. DOI: 10.13873/j.1000-9787(2017)07-0134-04.

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