Design of a high precision capacitive MEMS accelerometer system

LI Zong-wei; YANG Yan; XIONG Xing-yin; CONG Ning; XIN Wei; HAN Ke-du

doi:10.13873/j.1000-9787(2017)06-0098-04

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Design of a high precision capacitive MEMS accelerometer system

更新时间：2025-09-11

- Design of a high precision capacitive MEMS accelerometer system
- Vol. 36, Issue 6, Pages: 98-101+104(2017)
- 作者机构：
  
  1. 中国科学院地质与地球物理研究所中国科学院油气资源研究重点实验室
  2. 中国科学院大学
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2017)06-0098-04
  CLC： TH824.4
- Published：2017
- 稿件说明：
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[1]李宗伟,杨燕,熊兴崟,丛宁,辛维,韩可都.高精度电容式MEMS加速度计系统设计[J].传感器与微系统,2017,36(06):98-101+104.

LI Zong-wei, YANG Yan, XIONG Xing-yin, et al. Design of a high precision capacitive MEMS accelerometer system[J]. 2017, 36(6): 98-101+104.
[1]李宗伟,杨燕,熊兴崟,丛宁,辛维,韩可都.高精度电容式MEMS加速度计系统设计[J].传感器与微系统,2017,36(06):98-101+104. DOI： 10.13873/j.1000-9787(2017)06-0098-04.

LI Zong-wei, YANG Yan, XIONG Xing-yin, et al. Design of a high precision capacitive MEMS accelerometer system[J]. 2017, 36(6): 98-101+104. DOI： 10.13873/j.1000-9787(2017)06-0098-04.

摘要

在传统Σ-Δ架构基础上

引入了低精度高速模/数转换器（ADC）

将前置放大器输出的模拟电压信号转换为数字信号

有利于简化电容式微电子机械系统（MEMS）加速度计系统模拟接口电路设计。在嵌入ADC的MEMS加速度系统中

采用过采样平均数字算法对信号进行估计

有效降低系统对前置放大器噪声性能的需求

利于实现低功耗和高精度的设计目标。仿真结果表明:与未采用过采样平均技术相比

当前置放大器输出等效噪声大于1μV/Hz

1/2

时

系统的信噪比（SNR）提高了约10 dB。

Abstract

A low precision

high speed analog digital converter（ ADC） is embedded on the basis of traditionalΣ-Δ architecture

to simplify analog interface circuit design of capacitive MEMS accelerometer system. ADC is used to convert analog voltage signal of analog front end amplifier output to digital signal. Based on capacitive MEMS accelerometer system embedded with anADC

an over sampling average digital algorithm is used to evaluate the signal

which can effectively reduce the system requirement of the noise performance of front end amplifier. This method provides potential to achieve low power consumption and high precision design. Simulation results show that SNR of accelerometer presented is improved about 10 dB than that of system without using over sampling average technique.

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references

新型电容式MEMS加速度计数字接口电路设计 [J]. 李宗伟,丛宁,熊兴崟,韩可都,杨长春. 电子学报 . 2016(10)

A high-order closed-loop ΣΔ interface for micro-machined accelerometer sensor [J] . Honglin Xu,Xiaowei Liu,Qiang Fu,Bingjun Lv. Analog Integrated Circuits and Signal Processing . 2015 (2)

HP AND SHELL PREPARE ADVANCED GEOPHYSICAL SEISMIC SENSING [J] . Roger Allan. Electronic Design . 2011 (6)

A novel micromachined accelerometer capacitive interface [J] . Michael Kraft,Christopher Lewis,Thomas Hesketh,Stefan Szymkowiak. Sensors & Actuators: A. Physical . 1998 (1)

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