Research on surge detection technology based on MEMS pressure sensor array

QI Na; FU Shi-min; WANG Shi-ning; LIU Xing-yu; CHEN Li-jie

doi:10.13873/j.1000-9787(2017)06-0057-02

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Research on surge detection technology based on MEMS pressure sensor array

更新时间：2025-09-11

- Research on surge detection technology based on MEMS pressure sensor array
- Vol. 36, Issue 6, Pages: 57-58+62(2017)
- 作者机构：
  
  中国电子科技集团公司第四十九研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2017)06-0057-02
  CLC： TP212
- Published：2017
- 稿件说明：
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[1]齐娜,付士民,王世宁,刘兴宇,陈丽洁.基于MEMS压力传感器阵列的浪涌检测技术研究[J].传感器与微系统,2017,36(06):57-58+62.

QI Na, FU Shi-min, WANG Shi-ning, et al. Research on surge detection technology based on MEMS pressure sensor array[J]. 2017, 36(6): 57-58+62.
[1]齐娜,付士民,王世宁,刘兴宇,陈丽洁.基于MEMS压力传感器阵列的浪涌检测技术研究[J].传感器与微系统,2017,36(06):57-58+62. DOI： 10.13873/j.1000-9787(2017)06-0057-02.

QI Na, FU Shi-min, WANG Shi-ning, et al. Research on surge detection technology based on MEMS pressure sensor array[J]. 2017, 36(6): 57-58+62. DOI： 10.13873/j.1000-9787(2017)06-0057-02.

摘要

提出了一种基于微机电系统（MEMS）压力传感器阵列的浪涌检测技术。通过在压力作用区域内布放MEMS压力传感器阵列

从而获取各测试点上的压力值

对这些压力值进行处理得到相应区域的压力变化趋势。经MEMS压力传感器阵列检测实验系统验证表明:此设计方案能够准确检测到浪涌信号

分辨出浪涌的方向及幅值变化。

Abstract

A surge detection technique based on MEMS pressure sensor array is introduced. Through placing MEMS pressure sensor array in pressure area

so as to obtain pressure value of each test point

these pressure values are processed to get the pressure change trend of the corresponding area. The MEMS pressure sensor array detection test system verify that this design scheme can accurately detect surge signal

distinguish direction and amplitude change of surge.

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references

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基于LabVIEW的超声电机测试系统 [J]. 程廷海,黄鹞,包钢,高焓. 传感器与微系统 . 2011(04)

现场波浪观测技术发展和应用 [J]. 左其华. 海洋工程 . 2008(02)

海浪理论与计算原理[M]. 科学出版社 , 文圣常, 1984

A flexible liquid crystal polymer MEMS pressure sensor array for fish-like underwater sensing [J] . A G P Kottapalli,M Asadnia,J M Miao,G Barbastathis,M S Triantafyllou. Smart Materials and Structures . 2012 (11)

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