Design of a novel micro-force sensor

ZHANG Xiao-ming; LIU Xiao-dong; BAN Jiong; CHEN Jing-yu; GU Xiao-wen

doi:10.13873/j.1000-9787(2015)03-0100-03

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Design of a novel micro-force sensor

更新时间：2025-09-11

- Design of a novel micro-force sensor
- Vol. 34, Issue 3, Pages: 100-102(2015)
- 作者机构：
  
  1. 上海航天控制技术研究所
  2. 同济大学机械与能源工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2015)03-0100-03
  CLC： TP212
- Published：2015
- 稿件说明：
移动端阅览
[1]章晓明,刘晓东,班炯,陈靖宇,顾小稳.一种新型微力传感器设计[J].传感器与微系统,2015,34(03):100-102.

ZHANG Xiao-ming, LIU Xiao-dong, BAN Jiong, et al. Design of a novel micro-force sensor[J]. 2015, 34(3): 100-102.
[1]章晓明,刘晓东,班炯,陈靖宇,顾小稳.一种新型微力传感器设计[J].传感器与微系统,2015,34(03):100-102. DOI： 10.13873/j.1000-9787(2015)03-0100-03.

ZHANG Xiao-ming, LIU Xiao-dong, BAN Jiong, et al. Design of a novel micro-force sensor[J]. 2015, 34(3): 100-102. DOI： 10.13873/j.1000-9787(2015)03-0100-03.

摘要

设计了一种新型微力传感器

利用电阻式应变原理

采用柱式结构

量程小

灵敏度高

灵敏度可达0.0575V/N

适用于微力测量。对其弹性元件进行有限元静力分析和模态分析

传感器弹性元件的纵向应变量高于一般的力传感器

固有频率远高于常见的外部动态力频率

几乎不会发生共振现象;最后对微力传感器进行静态标定和误差分析。

Abstract

Design a novel micro-force sensor

use principle of resistive strain

the sensor adopts pillar type structure

with small range and high sensitivity

sensitivity of the sensor can reach 0.0575V/N

which is suitable for micro force measurement. The elastic component is carried out on finite element static analysis and modal analysis. The lengthways dependent variable of the sensor is much higher than the common force sensor

and the natural frequency is much higher than common external dynamic force frequency

which rarely occur resonance.Finally

static calibration and error analysis is carried out.

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references

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